A Fluorinated Organic-Silica Film with Extremely Low Dielectric-Constant
スポンサーリンク
概要
- 論文の詳細を見る
- 1998-09-07
著者
-
松村 正清
東京工業大学工学部:(現)(株)液晶先端技術開発センター
-
UCHIDA Yasutaka
Dept. of Electronics and Information Science, Nishi-Tokyo Univ.
-
MATSUMURA Masakiyo
Dept. of Physical Electronics, Tokyo Institute of Technology
-
松村 正清
東京工業大学工学部電子物理科
-
Uchida Y
Aichi Inst. Technol. Toyota Jpn
-
Taguchi K
Department Of Electronics And Electrical Engieering Fukuyama University
-
TAGUCHI Kohshi
Dept. of Electronics and Information Science, Teikyo University of Science and Technology
-
Uchida Y
Department Of Electrical Engineering Aichi Institute Of Technology Toyota
-
Uchida Y
Yamaguchi Univ. Yamaguchi Jpn
関連論文
- 次世代Si薄膜デバイスを目指した超巨大結晶粒形成法
- エキシマレーザを用いた巨大結晶粒Si薄膜の形成
- 次世代Si薄膜デバイスを目指した超巨大結晶粒形成法
- Two-Dimensionally Position-Controlled Excimer-Laser-Crystallization of Silicon Thin Films on Glassy Substrate
- A Proposed Organic-Silica Film for Inter-Metal-Dielectric Application
- プレナリー講演1 ジャイアントマイクロエレクトロニクス : 過去から未来へ
- プレナリー講演1 ジャイアントマイクロエレクトロニクス : 過去から未来へ
- Preparation of Position-Controlled Crystal-Silicon Island Arrays by Means of Excimer-Laser Annealing
- 薄膜トランジスタの研究と開発
- A Novel Phase-Modulated Excimer-Laser Crystallization Method of Silicon Thin Films
- Preparation of Organic Silica Films with Low Dielectric Constant from the Liquid Phase
- Excimer-Laser-Induced Lateral-Growth of Silicon Thin-Films
- Excimer-Laser-Produced Single-Crystal Silicon Thin-Film Transistors
- Step-Covertage Characteristics of Silicon-Dioxide Films Formed by a New Low-Temperature Chemical-Vapor-Deposition Method
- Chemical Vapor Deposition of Hydrogen-Free Silicon-Dioxide Films
- 薄膜トランジスタ-創生から未来まで-
- Low-Temperature CVD of Silicon Dioxide by Alkoxyl-Silane-Isocyanate
- エキシマレーザのディスプレイ作製技術への応用
- Low-Temperature CVD of SiO_2 by Alkoxy-Silane-Iso-Cyanate
- Chemical Vapor Deposition of Amorphous Silicon Using Tetrasilane
- Hydrogen-Radical Annealing of Chemical Vapor-Deposited Amorphous Silicon Films
- アモルファスシリコン薄膜トランジスタへのポスト水素化の効果
- Spectroscopical Measurements of Ablation Plasma Generated by Excimer Laser from Functionally Graded Materials
- 安定共振器を伴った不安定共振器
- An Experimental Investigation of the Novel Unstable Resonator with a Stable Resonator Core
- Effect of Oxygen Deficiency on T_c of Oxide Superconductor La_Ba_Cu_3O_y : Electrical Properties of Condensed Matter
- Identification of the Superconducting Phase in the Nd-Ce-Sr-Cu-O System : Electrical Properties of Condensed Matter
- On the 110 K Superconductor in the Bi-Ca-Sr-Cu-O System : Electrical Properties of Condensed Matter
- Identification of the Superconducting Phase in the Bi-Ca-Sr-Cu-O System : Electrical Properties of Condensed Matter
- シリコン薄膜の振幅・位相制御エキシマレーザ溶融再結晶化法 : 新しい2-D位置制御大結晶粒形成法(低温または高温多結晶Siとアクティブマトリックス型ディスプレイ用薄膜トランジスタ論文特集)
- Copper phthalocyanine thin-film transistor with a polycarbonate gate dielectric layer (第47回真空に関する連合講演会プロシーディングス--2006年11月7日〜9日,大阪)
- Orientation of Metalphthalocyanine Molecule Deposited on Polycarbonate Thin Film
- Interfacial Layer in Thermally-grown Ultra thin Silicon Dioxides Measured by Grazing Incidence X-Ray Reflection
- Surface Preparation, Growth, and Interface Control of Ultrathin Gate Oxides
- Chemical Vapor Deposition Based Preparation on Porous Silica Films
- Atomic-Layer Epitaxy of Silicon on(100)Surface
- Hetero Atomic-Layer Epitaxy of Ge on Si(100)
- A Fluorinated Organic-Silica Film with Extremely Low Dielectric Constant
- Chemical-Vapor Deposition of OH-free and Low-k Organic-Silica Films
- Formation of an Atomically Abrupt Si/Ge Hetero-Interface
- Formation of Atomically Abrupt Si/Ge Hetero-Interface
- A Proposed Atomic-Layer-Deposition of Germanium on Si Surface
- A Proposed Atomic-Layer-Deposition of Germanium on Si(100)
- 細線構造を用いたSiの位置制御エキシマレーザ結晶化
- 水素フリー低温CVDSiO_2膜の最適成膜条件
- Orientation and Electrical Conduction of Poly(3-hexylethiophene) Thin Film Prepared by Using a Different Solution-process Method
- Photochemical Synthesis of Silver Colloids Stabilized with Poly(N-vinylpyrrolidone) in Alcohol-chloroform Mixing Solvent
- Photochemical Synthesis of Silver Colloids Stabilized with Poly(N-vinylpyrrolidone) in Alcohol-chloroform Mixing Solvent
- Preparation, Characterization, Growing Process and Nonlinear Optical Property of Large Vanadyl-Phthalocyanine Single Crystal (Special Issue on Organic Molecular Electronics for the 21st Century)
- Lateral Growth of Poly-Si Film by Excimer Laser and Its Thin Film Transistor Application
- TFTとその応用
- Neutron Diffraction Study of Nonstoichiometry in Ba_La_Cu_3O_y : Electrical Properties of Condensed Matter
- Optical Force on a Micro-Sphere by the Laser Beam from a Lensed Optical Fiber Inserted at an Angle
- Optical Fiber Trapping in Space
- Dual-Beam Trapping Method for an Object with Large Relative Refractive Index
- A Theoretical Study of Optical Levitation of a Microsphere
- Numerical Computations of the Optical Forces Acting on an Elliptically Shaped Object
- Characteristics of Electron Density in Ablation Plasma Generated from Functionally Graded Material in Excimer Laser Processing
- A Fluorinated Organic-Silica Film with Extremely Low Dielectric-Constant
- Ionization Mechanism of Cesium Plasma Produced by Irradiation of Dye Laser
- Magnetic Properties of NaV_6O_
- Length of Laser-Produced Dense Plasma in High Pressure Argon Gases
- 応用物理学会の現状と課題
- Subgap Absorption of Boron-Doped and Undoped a-SiC:H Detected by Photothermal Deflection Spectroscopy
- Hydrogenated Amorphous Silicon Germanium Alloys Prepared by Triode rf Glow Discharge
- The Role of Hydrogen in the Staebler-Wronski Effect of a-Si:H
- Low-Temperature Chemical-Vapor-Deposition of Silicon-Nitride Film from Hexachloro-Disilane and Hydrazine
- Effects of Light Pulse Duration on Excimer-Laser Crystallization Characteristics of Silicon Thin Films
- サブミクロンチャネルアモルファスシリコン薄膜トランジスタ : 情報ディスプレイ
- サブミクロンチャネルアモルファスシリコン薄膜トランジスタ
- Dark Current and Breakdown Analysis in In(Al)GaAs/InAlAs Superlattice Avalanche Photodiodes
- Band Offset Dependance on Impact Ionization Rates in InAlGaAs Staircase Avalanche Photodiodes
- Doping Properties of Zinc in InAlGaAs Grown by Low-Pressure Metal-Organic Vapor-Phase Epitaxy
- InAlGaAs Staircase Avalanche Photodiodes
- Superconductivity of YBa_2Cu_M_xO_y (M=Co, Fe, Ni, Zn)
- TFT-技術の変遷からその未来を測る
- A Novel Post-Hydrogenation Process for Chemical-Vapor-Deposited a-Si Thin-Film Transistors