Low-Temperature CVD of Silicon Dioxide by Alkoxyl-Silane-Isocyanate
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概要
- 論文の詳細を見る
- 1996-02-01
著者
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松村 正清
東京工業大学工学部:(現)(株)液晶先端技術開発センター
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Matsumura Masakiyo
Department of Physical Electronics, Tokyo Institute of Technology
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UCHIDA Yasutaka
Department of Electronics and Information Science, Teikyo University of Science and Technology
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TAKEI Shu
Department of Electronics and Information Science, Teikyo University of Science and Technology
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Uchida Y
Aichi Inst. Technol. Toyota Jpn
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