Application of Amorphous-Silicon Field-Effect Transistors in Three-Dimensional Integrated Circuits
スポンサーリンク
概要
- 論文の詳細を見る
Amorphous-silicon field-effect transistors have been integrated into three-dimensional form for the first time, and the static as well as dynamic characteristics were evaluated. Inverters and nine-stage ring-oscillators fabricated on a fused silica substrate have two layers of FETs isolated by CVD SiO_2. The inverters had step-like transfer characteristics and a small-signal gain of about 10 was obtained. The ring-oscillator experiment showed that the minimum proparation delay time per gate was about 60 μsec.
- 社団法人応用物理学会の論文
- 1983-06-20
著者
-
Nara Yasuo
Department Of Pharmacy School Of Pharmacy Shujitsu University
-
Matsumura Masakiyo
Department of Physical Electronics, Tokyo Institute of Technology
-
KUDOU Yoshimitsu
Department of Physical Electronics, Tokyo Institute of Technology
-
Matsumura Masakiyo
Department Of Electrical And Electronic Engineering Tokyo Institute Of Technology
-
Nara Yasuo
Department Of Physical Electronics Tokyo Institute Of Technology
-
Nara Yasuo
Department Of Nutrition Science Division Of Applied Life Sciences Graduate School Of Integrated Scie
-
Kudou Yoshimitsu
Department Of Physical Electronics Tokyo Institute Of Technology
-
Nara Yasuo
Department of Medicine, SANRAKU Hospital
関連論文
- The Role of Cytochrome P-450 in Salt-Sensitive Stroke in Stroke-Prone Spontaneously Hypertensive Rats
- Tea Polyphenols Regulate Nicotinamide Adenine Dinucleotide Phosphate Oxidase Subunit Expression and Ameliorate Angiotensin II-Induced Hyperpermeability in Endothelial Cells
- Prevalence of Obesity and Dyslipidemia in Middle-Aged Men and Women in Tanzania, Africa : Relationship with Resting Energy Expenditure and Dietary Factors
- Effects of Vitamin E and Sesamin on Hypertension and Cerebral Thrombogenesis in Stroke-Prone Spontaneously Hypertensive Rats
- Distribution of Twenty-Four Hour Urinary Taurine Excretion and Association with Ischemic Heat Disease Mortality in 24 Populations of 16 Countries : Results from the WHO-CARDIAC Study
- Ethnic and Environmental Differences in Various Markers of Dietary Intake and Blood Pressure among Chinese Han and Three Other Minority Peoples of China: Results from the WHO Cardiovascular Diseases and Alimentary Comparison(CARDIAC) Study
- Leisure-Time Physical Activity and Other Factors in Relation to Blood Pressure in Japanese-Americans in Hawaii, USA
- THE EFFECTS OF CORONARY REPERFUSION ON SARCOLEMMAL Na^+, K^+-ATPase ACTIVITY IN DOGS
- Comparative Studies of Diet-Related Factors and Blood Pressure among Chinese and Japanese : Results from the China-Japan Cooperative Research of the WHO-CARDIAC Study
- Assessment of in vivo Oxidative Stress in Hypertensive Rats and Hypertensive Subjects in Tanzania, Africa
- Mapping of Four Simple Sequence Repeat(SSR) Markers on Rat Chromosome 4
- Cardiovascular Risk Factors Emerging in Chinese Populations Undergoing Urbanization
- Genetic Vulnerability of Cortical Neurons Isolated from Stroke-Prone Spontaneously Hypertensive Rats in Hypoxia and Oxygen Reperfusion
- Prevalence of Obesity and Dyslipidemia in Middle-Aged Men and Women in Tanzania, Africa: Relationship with Resting Energy Expenditure and Dietary Factors
- Training in Swimming Reduces Blood Pressure and Increases Muscle Glucose Transport Activity as Well as GLUT4 Contents in Stroke-Prone Spontaneously Hypertensive Rats
- Lower Mevalonate Pyrophosphate Decarboxylase Activity Is Caused by the Reduced Amount of Enzyme in Stroke-Prone Spontaneously Hypertensive Rat
- Purification and Characterization of Two Mevalonate Pyrophosphate Decarboxylases from Rat Liver: A Novel Molecular Species of 37 kDa
- Effects of Heavy Ion Particle Radiation to Hind Limbs Locally on Bone in SHRSP as a Model of Osteoporosis
- 4) HISTOPATHOLOGICAL INVESTIGATION OF VARIOUS ORGANS IN MYOCARDIAL ISCHEMIC RATS (MIR)
- 1)NOREPINEPHRINE-INDUCED HYPERTROPHY OF CULTURED MYOCYTES : THE 7th CONFERENCE ON CARDIOMYOPATHY
- DIETARY RISK FACTORS OF STROKE AND HYPERTENSION IN JAPAN : Part 3 : Comparative Study on Risk Factors between Farming and Fishing Villages in Japan
- Two-Dimensionally Position-Controlled Excimer-Laser-Crystallization of Silicon Thin Films on Glassy Substrate
- A Proposed Organic-Silica Film for Inter-Metal-Dielectric Application
- Preparation of Position-Controlled Crystal-Silicon Island Arrays by Means of Excimer-Laser Annealing
- A Novel Phase-Modulated Excimer-Laser Crystallization Method of Silicon Thin Films
- Preparation of Organic Silica Films with Low Dielectric Constant from the Liquid Phase
- Excimer-Laser-Induced Lateral-Growth of Silicon Thin-Films
- Excimer-Laser-Produced Single-Crystal Silicon Thin-Film Transistors
- Step-Covertage Characteristics of Silicon-Dioxide Films Formed by a New Low-Temperature Chemical-Vapor-Deposition Method
- Chemical Vapor Deposition of Hydrogen-Free Silicon-Dioxide Films
- Low-Temperature CVD of Silicon Dioxide by Alkoxyl-Silane-Isocyanate
- Low-Temperature CVD of SiO_2 by Alkoxy-Silane-Iso-Cyanate
- Chemical Vapor Deposition of Amorphous Silicon Using Tetrasilane
- Characterization of Chemical-Vapor-Deposited Amorphous-Silicon Films
- Low-Temperature Chemical Vapor Deposition of Silicon Nitride Using A New Source Gas : Hydrogen Azide
- Hot-Wall Chemical-Vapor-Deposition of Amorphous-Silicon and Its Application to Thin-Film Transistors
- The Effects of Hot Ion-Implantation on the Electrical Properties of Amorphous-Silicon Films Produced by Chemical-Vapor-Deposition Method
- Chemical Vapour Deposition of Amorphous Silicon with Silanes for Thin Film Transistors : The Influence of the Amorphous Silicon Deposition Temperature
- Top-Gate Amorphous-Silicon Thin-Film Transistors Produced by CVD Method
- Optimization of Chemical Vapor Deposition Conditions of Amorphous-Silicon Films for Thin-Film Transistor Application
- Amorphous-Silicon Thin-Film Transistors Using Chemical Vapor Deposition of Disilane
- Amorphous-Silicon Thin-Film Transistors with Silicon Dioxide Gate Grown in Nitric-Acid Gas
- Normal-Pressure and Low-Temperature Thermal Oxidation of Silicon
- Diagnostic Study of VHF Plasma and Deposition of Hydrogenated Amorphous Silicon Films
- Generation of Electron Cyclotron Resonance Plasma in the VHF Band
- -170-Na^+-H^+ EXCHANGE ACTIVITY AND CYTOPLASMIC pH IN CULTURED VASCULAR SMOOTH MUSCLE CELLS FROM STROKE-PRONE SPONTANEOUSLY HYPERTENSIVE RATS : Cardiac Metabolism, Cardiac Biochemistry : FREE COMMUNICATIONS(I) : PROCEEDINGS OF THE 53th ANNUAL SCIENTIFIC M
- Fabrication and Delay Time Analysis of Deep Submicron CMOS Devices
- Ti Salicide Process for Subquarter-Micron CMOS Devices (Special Issue on Quarter Micron Si Device and Process Technologies)
- Wafer Cleaning with Photoexcited Chlorine and Thermal Treatment for High-Quality silicon Epitaxy : Beam Induced Physics and Chemistry
- Atomic Layer Etching of Silicon by Thermal Desorption Method
- Chemical Vapor Deposition Based Preparation on Porous Silica Films
- Atomic-Layer Epitaxy of Silicon on(100)Surface
- Hetero Atomic-Layer Epitaxy of Ge on Si(100)
- A Fluorinated Organic-Silica Film with Extremely Low Dielectric Constant
- Formation of an Atomically Abrupt Si/Ge Hetero-Interface
- Formation of Atomically Abrupt Si/Ge Hetero-Interface
- A Proposed Atomic-Layer-Deposition of Germanium on Si Surface
- A Proposed Atomic-Layer-Deposition of Germanium on Si(100)
- Preventive Effects of Shinchimotsu-koka-to on Renal Lesions in Stroke-Prone Spontaneously Hypertensive Rats
- Lateral Growth of Poly-Si Film by Excimer Laser and Its Thin Film Transistor Application
- Drastic Enlargement of Grain Size of Excimer-Laser-Crystallized Polysilicon Films
- GLUCOSE TOLERANCE IN SPONTANEOUSLY HYPERTENSIVE RATS
- Analysis of an Unidentified Plasma Protein in Spontaneously Hypertensive Rats (SHR)
- Genetic and Environmental Modification of Spontaneous Hypertension : III. Essential Hypertension : SYMPOSIUM ON GENE-ENVIRONMENT INTERACTION IN CARDIOVASCULAR DISEASES
- Evaluation of Deep States in Amorphous-Silicon / Silicon-Nitride System from Charge-Coupled Device Characteristics : Semiconductors and Semiconductors Devices
- p-Channel Amorphous Silicon Thin-Film Transistors with High Hole Mobility : Semiconductors and Semiconductor Devices
- Numerical Analysis of the Dynamic Characteristics of Amorphous Silicon Thin-Film Transistors : Semiconductors and Semiconductor Devices
- Fabrication of Nanostructure by Anisotropic Wet Etching of Silicon : Techniques, Instrumentations and Measurement
- Quantum-Size Effect from Photoluminescence of Low-Temperature-Oxidized Porous Si
- Experimental and Clinical Studies on the Relationship between Genetic Hypertension and Glucose Metabolism
- Vertical-Type Amorphous-Silicon Field-Effect Transistors with Small Parasitic Elements
- Low-Temperature Thermal-Oxidation of Silicon
- DIETARY RISK FACTORS OF STROKE AND HYPERTENSION IN JAPAN : Part 2 : Validity of Urinarysis for Dietary Salt and Protein Intakes under a Field Condition
- DIETARY RISK FACTORS OF STROKE AND HYPERTENSION IN JAPAN : Part 1 : Methodological Assessment of Urinalysis for Dietary Salt and Protein Intakes
- Further Vectorcardiographical and Pathotopographical Studies on the Heart of Spontaneously Hypertensive Rats (SHR)
- VECTORCARDIOGRAPHIC STUDY ON LEFT VENTRICULAR HYPERTROPHY IN SPONTANEOUSLY HYPERTENSIVE RATS
- Synchrotron-Radiation-Induced Modification of Silicon Dioxide Film at Room Temperature : Beam Induced Physics and Chemistry
- Synchrotron-Radiation-Induced Modification of Silicon Dioxide Film at Room Temperature
- Synchrotron Radiation-Assisted Removal of Oxygen and Carbon Contaminants from a Silicon Surface
- Electronic Structures of Si-Based Manmade Crystals
- Newly Designed Hg Cell for Molecular Beam Epitaxy Growth of CdHgTe
- Excimer-Laser Annealing Technology for Hydrogenated Amorphous-Silicon Devices
- Low-Temperature Chemical-Vapor-Deposition of Silicon-Nitride Film from Hexachloro-Disilane and Hydrazine
- Effects of Light Pulse Duration on Excimer-Laser Crystallization Characteristics of Silicon Thin Films
- Measurement of Electron Mobility in Hydrogenated Amorphous-Silicon Using 4-Terminal Transistor Structures
- Proposed Planar-Type Amorphous-Silicon MOS Transistors
- A New Nucleation-Site-Control Excimer-Laser-Crystallization Method
- A New Thermal-Oxidation Method for III-V Semiconductors
- Application of Hydrogenated Amorphous-Silicon to Bipolar Transistors
- High-Performance Poly-Si Thin-Film Transistors with Excimer-Laser Annealed Silicon-Nitride Gate
- High-Mobility Bottom-Gate Thin-Film Transistors with Laser-Crystallized and Hydrogen-Radical-Annealed Polysilicon Films
- 1 μm-Long Amorphous-Silicon Thin-Film Transistors with Wide Dynamic Range
- A Novel Double-Pulse Excimer-Laser Crystallization Method of Silicon Thin-Films
- Fully Self-Aligned Amorphous-Silicon MUS Transistors
- Application of Amorphous-Silicon Field-Effect Transistors in Three-Dimensional Integrated Circuits
- SYMPTOMATOLOGICAL CLASSIFICATION IN THE DEVELOPMENT OF STROKE IN STROKE-PRONE SPONTANEOUSLY HYPERTENSIVE RATS
- Evaluation of Photoemitted Current from SiO_2 Film on Silicon During Synchrotron Radiation Irradiation
- Chemical Structures of Native Oxides Formed during Wet Chemical Treatments
- Synchrotron Radiation-Assisted Silicon Film Growth by Irradiation Parallel to the Substrate
- Development of novel rat model for high-fat and high-cholesterol diet-induced steatohepatitis and severe fibrosis progression in SHRSP5/Dmcr