A New Thermal-Oxidation Method for III-V Semiconductors
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1984-07-20
著者
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Matsumura Masakiyo
Department of Physical Electronics, Tokyo Institute of Technology
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SUGIURA Osamu
Department of Physical Electronics, Tokyo Institute of Technology
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Takahashi Toshio
Department of Applied Physics, Faculty of Engineering, University of Tokyo
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Matsumura Masakiyo
Department Of Electrical And Electronic Engineering Tokyo Institute Of Technology
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Sugiura Osamu
Department Of Electrical And Electronic Engineering Tokyo Institute Of Technology
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TAKAGI Yuhichi
Department of Physical Electronics, Tokyo Institute of Technology
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NARUKE Yasuo
Department of Physical Electronics, Tokyo Institute of Technology
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Naruke Y
Department Of Physical Electronics Tokyo Institute Of Technology
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Naruke Yasuo
Department Of Physical Electronics Faculty Of Engineering Tokyo Institute Of Technology
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Takagi Yuhichi
Department Of Physical Electronics Tokyo Institute Of Technology
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Takahashi Toshio
Department Of Physical Electronics Tokyo Institute Of Technology
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Takahashi Toshio
Department Of Applied Physics Faculty Of Engineering University Of Tokyo
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