Preparation of Giant-Grain Seed Layer for Poly-Silicon Thin-Film Solar Cells
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概要
- 論文の詳細を見る
A silicon thin-film with giant grains has been formed on a stacked substrate having a low melting point metallic layer and a low heat capacitance layer. Grains as large as 17 μm could be fabricated by application of a single shot of an excimer-laser light pulse with light intensity gradient to this structure. This technology seems attractive for the fabrication of giant-grain poly-Si thin-film solar cells.
- 社団法人応用物理学会の論文
- 1999-02-01
著者
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Matsumura Masakiyo
Department Of Electrical And Electronic Engineering Tokyo Institute Of Technology
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Yeh Wen-chang
Department Of Physical Electronics Tokyo Institute Of Technology
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Yeh Wen-chang
Department Of Physical Electronics Faculty Of Engineering Tokyo Institute Of Technology
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