Low-Temperature Chemical Vapor Deposition of Silicon Nitride Using A New Source Gas : Hydrogen Azide
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1992-02-01
著者
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Kanoh Hiroshi
Department of Cardiology, Oume City General Hospital
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Matsumura Masakiyo
Department of Physical Electronics, Tokyo Institute of Technology
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Kanoh Hiroshi
Department Of Physical Electronics Tokyo Institute Of Technology:(present Address)display Device Res
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Kanoh Hiroshi
Functional Devices Research Laboratories Nec Corporation
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SUGIURA Osamu
Department of Physical Electronics, Tokyo Institute of Technology
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ISHIHARA Ryouichi
Department of Physical Electronics, Tokyo Institute of Technology
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Matsumura Masakiyo
Department Of Electrical And Electronic Engineering Tokyo Institute Of Technology
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杉浦 修
Tokyo Inst. Technol. Tokyo Jpn
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Sugiura Osamu
Department Of Electrical And Electronic Engineering Tokyo Institute Of Technology
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Kanoh Hiroshi
Department Of Cardiology Oume City Hospital
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Ishihara Ryouichi
Department Of Physical Electronics Tokyo Institute Of Technology
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