Hydrogen-Radical Annealing of Chemical Vapor-Deposited Amorphous Silicon Films

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1990-12-20

著者

• Kanoh Hiroshi

  Department Of Physical Electronics Tokyo Institute Of Technology:(present Address)display Device Res

• Kanoh Hiroshi

  Functional Devices Research Laboratories Nec Corporation

• UCHIDA Yasutaka

  Dept. of Electronics and Information Science, Nishi-Tokyo Univ.

• KANOH Hiroshi

  Dept. of Physical Electronics, Tokyo Institute of Technology

• SUGIURA Osamu

  Dept. of Physical Electronics, Tokyo Institute of Technology

• MATSUMURA Masakiyo

  Dept. of Physical Electronics, Tokyo Institute of Technology

• Uchida Y

  Aichi Inst. Technol. Toyota Jpn

• 杉浦 修

  Tokyo Inst. Technol. Tokyo Jpn

• Uchida Y

  Department Of Electrical Engineering Aichi Institute Of Technology Toyota

• Uchida Y

  Yamaguchi Univ. Yamaguchi Jpn

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