Drastic Enlargement of Grain Size of Excimer-Laser-Crystallized Polysilicon Films

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1992-12-30

著者

• Shimizu Kazuhiro

  Departments Of Cardiovascular Center Sakura Medical Center School Of Medicine Toho University

• Choi D‐h

  Kyungpook National Univ. Daegu Kor

• Matsumura Masakiyo

  Department of Physical Electronics, Tokyo Institute of Technology

• SASAMORI Kenichiro

  Institute for Materials Research, Tohoku University

• SUGIURA Osamu

  Department of Physical Electronics, Tokyo Institute of Technology

• Choi D‐h

  School Of Electrical Engineering And Computer Science Kyungpook National University

• Shimizu K

  Department Of Physical Electronics Tokyo Institute Of Technology

• Shimizu K

  Electrotechnical Laboratory

• Shimizu Keizo

  Electrotechnical Lanoratory

• CHOI Do-Hyun

  Department of Physical Electronics, Tokyo Institute of Technology

• Shimizu Kazuhiro

  Department Of Dermatology Nagasaki University Graduate School Of Biomedical Sciences

• Matsumura Masakiyo

  Department Of Electrical And Electronic Engineering Tokyo Institute Of Technology

• Choi Do-hyun

  Department Of Physical Electronics Tokyo Institute Of Technology

• 杉浦 修

  Tokyo Inst. Technol. Tokyo Jpn

• Sugiura Osamu

  Department Of Electrical And Electronic Engineering Tokyo Institute Of Technology

• Sasamori Kenichiro

  Institute For Materials Research Tohoku University

• Shimizu Kazuhiro

  Department of Cardiovascular Center, Sakura Hospital, Toho University Medical Center

関連論文

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• Preparation of Position-Controlled Crystal-Silicon Island Arrays by Means of Excimer-Laser Annealing
• A Novel Phase-Modulated Excimer-Laser Crystallization Method of Silicon Thin Films
• Preparation of Organic Silica Films with Low Dielectric Constant from the Liquid Phase
• Excimer-Laser-Induced Lateral-Growth of Silicon Thin-Films
• Excimer-Laser-Produced Single-Crystal Silicon Thin-Film Transistors
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