Synchrotron Radiation-Assisted Silicon Film Growth by Irradiation Parallel to the Substrate
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概要
- 論文の詳細を見る
Growth of silicon films by synchrotron radiation (SR) photolysis of Si_2H_6 is studied for temperatures below 500℃. SR is irradiated parallel to the substrate to grow silicon film over a large area and to avoid substrate heating and gas dissociation by photoelectrons. The thickness uniformity in a 2-inch wafer is over 50% while an SR cross section is about 1×10 mm. At substrate temperatures above 300℃, the hydrogen content of the film is low enough that epitaxial silicon film is successfully grown.
- 社団法人応用物理学会の論文
- 1992-08-15
著者
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Nara Yasuo
Department Of Pharmacy School Of Pharmacy Shujitsu University
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Nara Yasuo
就実大学 薬学部応用薬学
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Nara Yasuo
武庫川女子大学
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Yamori Y
Institute For World Health Development Mukogawa Women's University
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Itakura T
Fujitsu Lab. Ltd. Atsugi Jpn
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SUGITA Yoshihiro
Fujitsu Laboratories Ltd.
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ITO Takashi
Fujitsu Laboratories Ltd.
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Nara Y
Univ. East Asia Shimonoseki Jpn
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Nara Yasuo
Fujitsu Laboratories Ltd.
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HORIUCHI Kei
Fujitsu Laboratories Ltd.
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Sugita Yutaka
Research Institute Of Electrical Communication Tohoku University
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Sugita Yutaka
Hitachi Research Laboratory Hitachi Lid.
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Sugita Y
Department Of Physics Toyama University
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Horiuchi K
Fujitsu Laboratories Ltd.
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Horiuchi Kei
Fujitsu Laboratories
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