Thermal Stability of the Yttrium Aluminate Film and the Suppression of its structural change and electrical properties degradation
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概要
- 論文の詳細を見る
- 2005-09-13
著者
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SUGITA Yoshihiro
Fujitsu Laboratories Ltd.
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Yamamoto Tetsushi
Material And Life Science Graduate School Of Engineering Osaka University
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YAMAMOTO Takashi
Toray Research Center, Inc.
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IZUMI Yukiko
Toray Research Center, Inc.
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MIYAMOTO Takashi
Toray Research Center, Inc.
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SEKI Hirohumi
Toray Research Center, Inc.
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HASHIMOTO Hideki
Toray Research Center, Inc.
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INOUE Minoru
TAIYO NIPPON SANSO CORPORATION
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OOSAWA Masanori
TAIYO NIPPON SANSO CORPORATION
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HASAKA Satoshi
TAIYO NIPPON SANSO CORPORATION
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IKEDA Kazuto
Fujitsu Laboratories Ltd.
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Seki Hirohumi
Toray Research Center Inc.
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Hashimoto H
The Dept. Of Electrical & Electronic System Kanazawa University
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Yamamoto T
Toray Research Center Inc.
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Ikeda Kazuto
Fujitsu Laboratories Limited
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Sugita Y
Fujitsu Laboratories Ltd.
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Hashimoto H
Toray Research Center Inc.
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Hashimoto Hideki
Toray Research Center Inc.
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Miyamoto Takashi
Toray Research Center Inc.
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Yamamoto Takashi
Toray Research Center Inc., Otsu 520-8567, Japan
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