SiOCH Films with Hydrocarbon Network Bonds : First-Principles Investigation
スポンサーリンク
概要
- 論文の詳細を見る
- 2006-09-13
著者
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Kobayashi Nobuyoshi
Semiconductor Leading Edge Technologies Inc. (selete)
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Kobayashi Nobuyoshi
Semiconductor & Integrated Circuits Div. Hitachi Ltd.
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INOUE Minoru
TAIYO NIPPON SANSO CORPORATION
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HASAKA Satoshi
TAIYO NIPPON SANSO CORPORATION
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Ohno T
National Research Institute For Metals
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Ohno Takahisa
National Institute For Materials Science
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Ohno Takahisa
Computational Materials Science Center National Institute For Materials Science
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Ohno Takahisa
National Research Institute For Metals
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KONDO Seiichi
Semiconductor Leading Edge Technologies, Inc. (Selete)
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TAJIMA Nobuo
First Principles Simulation Group, Computational Materials Science Center, National Institute for Ma
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HAMADA Tomoyuki
The FSIS Center for Collaborative Research, Institute of Industrial Science, University of Tokyo
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OHNO Takahisa
First Principles Simulation Group, Computational Materials Science Center, National Institute for Ma
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YONEDA Katsumi
Semiconductor Leading Edge Technologies, Inc. (Selete)
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SHINRIKI Manabu
Taiyo Nippon Sanso Corporation
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MIYAZAWA Kazuhiro
Taiyo Nippon Sanso Corporation
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SAKOTA Kaoru
Taiyo Nippon Sanso Corporation
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Ohno Takahisa
First Principles Simulation Group Computational Materials Science Center National Institute For Mate
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Hamada Tomoyuki
The Fsis Center For Collaborative Research Institute Of Industrial Science University Of Tokyo
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Tajima Nobuo
First Principles Simulation Group Computational Materials Science Center National Institute For Mate
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Yoneda Katsumi
Semiconductor Leading Edge Technologies Inc. (selete)
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Kondo Seiichi
Semiconductor Leading Edge Technologies Inc. (selete)
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Ohno Takahisa
Science University Of Tokyo
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TAJIMA Nobuo
First Department of Internal Medicine, Nagasaki University School of Medicine
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