Dissociative Adsorption Mechanism of Product Gas in W-CVD Revealed by Molecular Orbital Calculation and Its Determinant Role in Filling Features
スポンサーリンク
概要
- 論文の詳細を見る
- 1995-08-21
著者
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USHIO Jiro
Advanced Research Laboratory, Hitachi Ltd.
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MARUIZUMI Takuya
Advanced Research Laboratory, Hitachi Ltd.
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Kobayashi Nobuyoshi
Semiconductor Development Center Semiconductor & Integrated Circuits Division Hitachi Ltd.
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Kobayashi Nobuyoshi
Semiconductor & Integrated Circuits Div. Hitachi Ltd.
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USHIO Jiro
Central Research Laboratory, Hitachi, Ltd.
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MARUIZUMI Takuya
Central Research Laboratory, Hitachi, Ltd.
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Takemura Yoshiaki
Advanced Research Laboratory Hitachi Ltd.
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Takemura Yoshiaki
Central Research Laboratory Hitachi Ltd.
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IRIE Ryotaro
Central Research Laboratory, Hitachi, Ltd.
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Irie Ryotaro
Central Research Laboratory Hitachi Ltd.
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