Suppression of Charges in Al_2O_3 Gate Dielectric and Improvement of MOSFET Performance by Plasma Nitridation

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概要

• 論文の詳細を見る
• 2004-01-01

著者

• Endo Kazuhiko

  Division Of Biomaterials And Bioengineering Department Of Oral Rehabilitation School Of Dentistry He

• Endo Kazuhiko

  Silicon Systems Research Laboratories Nec Corporation

• Kamiyama S

  Faculty Of Science And Technology Meijo University

• Kamiyama S

  Silicon Systems Research Laboratories Nec Corporation

• Kamiyama Satoshi

  Ulsi Device Development Laboratories Nec Corporation

• Ogura Takashi

  Silicon Systems Research Laboratories Nec Corporation

• Ogura Takeshi

  Ntt Cyber Space Laboratories

• TATSUMI Toru

  System Devices Research Laboratories, NEC Corporation

• Yamamoto Tetsushi

  Material And Life Science Graduate School Of Engineering Osaka University

• Endo Kazuhiko

  Department Of Dental Materials Science School Of Dentistry Health Science University Of Hokkaido

• IWAMOTO Toshiyuki

  Silicon Systems Research Labs., NEC Corporation

• IKARASHI Nobuyuki

  Silicon Systems Research Labs., NEC Corporation

• YAMAMOTO Toyoji

  Silicon Systems Research Labs., NEC Corporation

• MANABE Kenzo

  Silicon Systems Research Laboratories, NEC Corporation

• KAMIYAMA Satoshi

  Silicon Systems Research Laboratories, NEC Corporation

• TATSUMI Toru

  Silicon Systems Research Laboratories, NEC Corporation

• Tatsumi Toru

  System Devices Research Laboratories Nec Corporation

• Tatsumi Toru

  Silicon Systems Research Laboratories Nec Corporation

• Ogura T

  Ntt Network Innovation Laboratories

• Kamiyama Satoshi

  Silicon Systems Research Laboratories Nec Corporation

• Manabe Katsuya

  System Devices Research Laboratories Nec Corporation

• Yamamoto Toyoji

  Silicon Systems Research Laboratories Nec Corporation

• Manabe Kenzo

  Silicon Systems Research Laboratories Nec Corporation

• Iwamoto T

  Keio Univ. Fujisawa‐shi Jpn

• Yamamoto T

  Toray Research Center Inc.

• IKARASHI Nobuyuki

  NEC Corporation, Device Platforms Research Laboratories

• Ikarashi N

  Nec Corporation Device Platforms Research Laboratories

• Ikarashi Nobuyuki

  Silicon Systems Research Laboratories Nec Corporation

• Ikarashi Nobuyuki

  System Devices Research Laboratories Nec Corporation

• Kamiyama Satoshi

  Faculty of Science and Technology, Meijo University

• Kamiyama Satoshi

  Faculty of Science and Technology, the 21st Century COE Program "Nano-Factory", Meijo University

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