Strain Relaxation Mechanisms in AlGaN Epitaxy on AlN Templates

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概要

• 論文の詳細を見る

• Two strain relaxation processes have been observed in AGaN layers grown on thick AlN templates. In Process I, $\mbi{a}$-type threading dislocations (TDs) with $\mbi{b}= 1/3\langle 11\bar{2}0\rangle$ from the AlN underlayer are inclined away from the [0001] axis toward the $\langle 1\bar{1}00\rangle$ directions when they enter the AlGaN film, forming dislocation line projection perpendicular to the Burger vector. In Process II, $\mbi{a}+\mbi{c}$-type TDs from the AlN underlayer with Burgers vector of $\mbi{b}= 1/3\langle 11\bar{2}3\rangle$ glide on $\{0\bar{1}11\}$ planes when they enter the AlGaN film to generate interfacial misfit dislocations lying along the $\langle\bar{2}110\rangle$ directions at the AlGaN/AlN interface.

• Japan Society of Applied Physicsの論文
• 2010-11-25

著者

• 天野 洋

  千葉大

• AMANO Hiroshi

  Graduate School of Horticulture, Chiba University

• Amano H

  Department Of Electrical Engineering And Computer Science Graduate School Of Engineering Nagoya Univ

• IWAYA Motoaki

  Faculty of Science and Technology, 21st-Century COE Program "Nano-factory", Meijo University

• KAMIYAMA Satoshi

  Faculty of Science and Technology, 21st-Century COE Program "Nano-factory", Meijo University

• AKASAKI Isamu

  Faculty of Science and Technology, 21st-Century COE Program "Nano-factory", Meijo University

• Kamiyama S

  Faculty Of Science And Technology Meijo University

• Kamiyama S

  Silicon Systems Research Laboratories Nec Corporation

• Kamiyama Satoshi

  Ulsi Device Development Laboratories Nec Corporation

• Kamiyama Satoshi

  Faculty Of Science And Technology Meijo University

• Akasaki I

  Faculty Of Science And Technology Meijo University

• Akasaki I

  Department Of Electrical And Electronic Engineering Faculty Of Science And Technology Meijo Universi

• Akasaki Isamu

  Department Of Electrical And Electronic Engineering Meijyo University

• Akasaki Isamu

  Department Of Electrical And Electronic Engineering And High-tech Research Center Meijo University

• Akasaki Isamu

  Faculty Of Science And Technology Meijo University

• Amano H

  Department Of Electrical And Electronic Engineering And High-tech Research Center Meijo University

• Ponce Fernando

  Arizona State Univ. Az Usa

• Ponce Fernando

  Department Of Physics Arizona State University

• Wu Zhihao

  Department Of Physics Arizona State University

• Iwaya M

  Faculty Of Science And Technology Meijo University

• Iwaya Motoaki

  Faculty Of Science And Technology Meijo University

• Ponce Fernando

  Department Of Physics And Astronomy Arizona State University

• 天野 洋

  Department Of Electrical Engineering And Computer Science Graduate School Of Engineering Nagoya Univ

• Amano Hiroshi

  Graduate School Of Horticulture Chiba Univ.

• Nagata Kensuke

  Meijo Univ. Nagoya Jpn

• Wu Zhihao

  Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan

• Nonaka Kentaro

  Faculty of Science and Technology, Meijo University, Nagoya 468-8502, Japan

• Kawai Yohjiro

  Graduate School of Engineering, Akasaki Research Center, Nagoya University, Nagoya 464-8603, Japan

• Asai Toshiaki

  Faculty of Science and Technology, Meijo University, Nagoya 468-8502, Japan

• Chen Changqing

  Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan

• Wu Zhihao

  Wuhan National Laboratory For Optoelectronics Huazhong University Of Science And Technology

• Chen Changqing

  Wuhan National Laboratory For Optoelectronics Huazhong University Of Science And Technology

• Asai Toshiaki

  Faculty Of Science And Technology Meijo University

• Kawai Yohjiro

  Graduate School Of Engineering Akasaki Research Center Nagoya University

• Amano Hiroshi

  Graduate School of Engineering and Akasaki Research Center, Nagoya University, Nagoya 464-8603, Japan

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