Flat $(11\bar{2}0)$ GaN Thin Film on Precisely Offset-Controlled $(1\bar{1}02)$ Sapphire Substrate
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概要
- 論文の詳細を見る
A high-quality thin $(11\bar{2}0)$ GaN layer with an atomically flat surface has been successfully grown on a precisely offset-angle-controlled $(1\bar{1}02)$ sapphire substrate by metal-organic vapor phase epitaxy. The insertion of an AlGaN layer between the underlying AlN layer and the GaN layer was found to improve the crystalline quality of the upper GaN layer.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2005-10-15
著者
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Imura Masataka
Faculty Of Science And Technology 21st-century Coe Program "nano-factory" Meijo University
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Nakano Kiyotaka
Faculty Of Science And Technology 21st-century Coe Program "nano-factory" Meijo University
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Kamiyama Satoshi
Faculty Of Science And Technology Meijo University
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Akasaki Isamu
Faculty Of Science And Technology Meijo University
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Iwaya Motoaki
Faculty Of Science And Technology Meijo University
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Amano Hiroshi
Faculty Of Horticulture Chiba University
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Akasaki Isamu
Faculty of Science and Technology, 21st-Century COE Program "Nano-Factory", Meijo University, 1-501 Shiogamaguchi, Tempaku-ku, Nagoya 468-8502, Japan
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Iwaya Motoaki
Faculty of Science and Technology, 21st-Century COE Program "Nano-factory", Meijo University, 1-501 Shiogamaguchi, Tempaku-ku, Nagoya 468-8502, Japan
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Tsuda Michinobu
Faculty of Science and Technology, 21st-Century COE Program "Nano-Factory", Meijo University, 1-501 Shiogamaguchi, Tempaku-ku, Nagoya 468-8502, Japan
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Amano Hiroshi
Faculty of Science and Technology, 21st-Century COE Program "Nano-factory", Meijo University, 1-501 Shiogamaguchi, Tempaku-ku, Nagoya 468-8502, Japan
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Hoshino Akira
Faculty of Science and Technology, 21st-Century COE Program "Nano-Factory", Meijo University, 1-501 Shiogamaguchi, Tempaku-ku, Nagoya 468-8502, Japan
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Hoshino Akira
Faculty of Science and Technology, 21st-Century COE Program "Nano-Factory", Meijo University, 1-501 Shiogamaguchi, Tempaku-ku, Nagoya 468-8502, Japan
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Nakano Kiyotaka
Faculty of Science and Technology, 21st-Century COE Program "Nano-factory", Meijo University, 1-501 Shiogamaguchi, Tempaku-ku, Nagoya 468-8502, Japan
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