Characterization of Ferroelectric Domain Behavior in MOCVD-PZT Capacitors for CMVP FeRAMs
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概要
- 論文の詳細を見る
- 2000-08-28
著者
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INOUE Naoya
System Devices Research Laboratories, NEC
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Ito Kimihiko
System Devices And Fundamental Research Nec Corporation
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TATSUMI Toru
System Devices Research Laboratories, NEC Corporation
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Mochizuki Yasunori
System Devices And Fundamental Research Nec Corporation
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HADA Hiromitsu
System Devices Research Laboratories, NEC Corporation
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Tatsumi Toru
System Devices Research Laboratories Nec Corporation
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Hada Hiromitsu
System Devices And Fundamental Research Nec Corporation
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HASE Takashi
ULSI Device Development Division, NEC Electron Devices, NEC Corporation
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MIYASAKA Yoichi
ULSI Device Development Division, NEC Electron Devices, NEC Corporation
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Hase Takashi
Ulsi Device Development Division Nec Electron Devices Nec Corporation
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Inoue Naoya
System Devices And Fundamental Research Nec Corporation
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Tatsumi Toru
System Devices And Fundamental Research Nec Corporation
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Miyasaka Yoichi
Ulsi Device Development Division Nec Electron Devices Nec Corporation
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