High Performance SiN-MIM Decoupling Capacitors with Surface-smoothed Bottom Electrodes for High-speed MPUs
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概要
- 論文の詳細を見る
- 2006-09-13
著者
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林 喜宏
NECシステムデバイス研究所
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林 喜宏
日本電気株式会社デバイスプラットフォーム研究所
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林 喜宏
日本電気株式会社マイクロエレクトロニクス研究所 超高集積回路研究部
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Harada Yoshimichi
Device Platforms Research Labs. Nec.
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KUME Ippei
System Devices Research Laboratories, NEC
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INOUE Naoya
System Devices Research Laboratories, NEC
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OHTAKE Hiroto
System Devices Research Laboratories, NEC
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SAITOH Shinobu
System Devices Research Laboratories, NEC
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FURUTAKE Naoya
System Devices Research Laboratories, NEC
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KAWAHARA Jun
System Devices Research Laboratories, NEC
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TODA Takeshi
NEC Electronics
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SHINMURA Toshiki
NEC Electronics
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MATSUI Koujirou
NEC Electronics
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IWAKI Takayuki
NEC Electronics
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OHTO Koichi
NEC Electronics
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FURUMIYA Masayuki
NEC Electronics
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HAYASHI Yoshihiro
System Devices Research Laboratories, NEC
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INOUE Naoya
Device Platforms Research Labs., NEC.
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FURUTAKE Naoya
Device Platforms Research Labs., NEC.
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HAYASHI Yoshihiro
Device Platforms Research Labs., NEC.
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Saito Shinobu
System Devices Research Laboratories Nec
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Ohtake Hiroto
System Devices Research Laboratories Nec
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Inoue Naoya
Device Platforms Research Labs. Nec.
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Kume Ippei
System Devices Research Laboratories Nec
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Furutake Naoya
Device Platforms Research Labs. Nec.
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Inoue Naoya
System Devices And Fundamental Research Nec Corporation
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Hayashi Yoshihiro
Nec Corporation
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Kawahara Jun
System Devices Research Laboratories Nec
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Hayashi Yoshihiro
LSI Fundamental Research Laboratory, NEC Electronics Corporation, 1120 Shimokuzawa, Sagamihara, Kanagawa 229-1198, Japan
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Hayashi Yoshihiro
System Devices Research Laboratories, NEC Corporation, 1120 Shimokuzawa, Sagamihara, Kanagawa 229-1198, Japan
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Kawahara Jun
System Devices and Fundamental Research, NEC Corporation, 1120, Shimokuzawa, Sagamihara, Kanagawa 229-1198, Japan
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Hayashi Yoshihiro
System Devices Research Laboratories, NEC, 1120 Shimokuzawa, Sagamihara, Kanagawa 229-1198, Japan
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Hayashi Yoshihiro
System Devices and Fundamental Research, NEC Corporation, 1120, Shimokuzawa, Sagamihara, Kanagawa 229-1198, Japan
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Hayashi Yoshihiro
Microelectronics Research Laboratories, NEC, 1120, Shimokuzawa, Sagamihara, Kanagawa 229, Japan
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