Impact of Barrier Metal Sputtering on Low-k SiOCH Films with Various Chemical Structures
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概要
- 論文の詳細を見る
- 2007-09-19
著者
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林 喜宏
NECシステムデバイス研究所
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林 喜宏
日本電気株式会社デバイスプラットフォーム研究所
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林 喜宏
日本電気株式会社マイクロエレクトロニクス研究所 超高集積回路研究部
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Harada Yoshimichi
Device Platforms Research Labs. Nec.
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TODA Takeshi
NEC Electronics
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INOUE Naoya
Device Platforms Research Labs., NEC.
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FURUTAKE Naoya
Device Platforms Research Labs., NEC.
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ITO Fuminori
Device Platforms Research Labs., NEC.
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YAMAMOTO Hironori
Device Platforms Research Labs., NEC.
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TAKEUCHI Tsuneo
Device Platforms Research Labs., NEC.
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HAYASHI Yoshihiro
Device Platforms Research Labs., NEC.
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Hayashi Yoshihiro
Device Platforms Research Labs. Nec.
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Ito Fuminori
Device Platforms Research Labs. Nec.
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Yamamoto Hironori
Nec Corp. Kanagawa Jpn
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Yamamoto Hironori
Device Platforms Research Labs. Nec.
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Inoue Naoya
Device Platforms Research Labs. Nec.
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Furutake Naoya
Device Platforms Research Labs. Nec.
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Hayashi Yoshihiro
Nec Corporation
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Hayashi Yoshihiro
Device Platforms Research Labs. Nec Corporation
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Inoue Naoya
Device Platforms Research Laboratories, NEC Corp., 1120 Shimokuzawa, Sagamihara, Kanagawa 229-1198, Japan
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Hayashi Yoshihiro
LSI Fundamental Research Laboratory, NEC Electronics Corporation, 1120 Shimokuzawa, Sagamihara, Kanagawa 229-1198, Japan
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Ito Fuminori
Device Platforms Research Laboratories, NEC Corp., 1120 Shimokuzawa, Sagamihara, Kanagawa 229-1198, Japan
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Hayashi Yoshihiro
Device Platforms Research Laboratories, NEC Corporation, 1120 Shimokuzawa, Sagamihara, Kanagawa 229-1198, Japan
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Hayashi Yoshihiro
System Devices Research Laboratories, NEC Corporation, 1120 Shimokuzawa, Sagamihara, Kanagawa 229-1198, Japan
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Yamamoto Hironori
Device Platforms Research Laboratories, NEC Corp., 1120 Shimokuzawa, Sagamihara, Kanagawa 229-1198, Japan
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Takeuchi Tsuneo
Device Platforms Research Laboratories, NEC Corp., 1120 Shimokuzawa, Sagamihara, Kanagawa 229-1198, Japan
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Hayashi Yoshihiro
System Devices Research Laboratories, NEC, 1120 Shimokuzawa, Sagamihara, Kanagawa 229-1198, Japan
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Hayashi Yoshihiro
Device Platforms Research Laboratories, NEC Corp., 1120 Shimokuzawa, Sagamihara, Kanagawa 229-1198, Japan
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Hayashi Yoshihiro
System Devices and Fundamental Research, NEC Corporation, 1120, Shimokuzawa, Sagamihara, Kanagawa 229-1198, Japan
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Hayashi Yoshihiro
Microelectronics Research Laboratories, NEC, 1120, Shimokuzawa, Sagamihara, Kanagawa 229, Japan
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Furutake Naoya
Device Platforms Research Laboratories, NEC Corp., 1120 Shimokuzawa, Sagamihara, Kanagawa 229-1198, Japan
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