Materials and Process Designs for FeRAM-embeded VLSI Devices

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概要

• 論文の詳細を見る
• 1999-09-20

著者

• 林 喜宏

  日本電気(株)マイクロエレクトロ二クス研究所

• Hayashi Yoshihiro

  Microelectronics Research Laboratories Nec Corporation

• Hayashi Yoshihiro

  Device Platforms Research Labs. Nec Corporation

• Hayashi Yoshihiro

  Ulsi Res. Lab Silicon Systems Res. Labs. Nec Corporation

• Hayashi Yoshihiro

  Ulsi Res. Lab Silicon Systems Res. Labs. Nec

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• Materials and Process Designs for FeRAM-embeded VLSI Devices

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