Characterization of HfO_2 Films Prepared on Various Surfaces for Gate Dielectrics
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概要
- 論文の詳細を見る
- 2004-01-01
著者
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Yoshikawa K
Laboratory Of Food Microbiological Engineering Faculty Of Agriculture Kinki University
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Yoshikawa Kentaro
Laboratory Of Food Microbiological Engineering Faculty Of Agriculture Kinki University
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SUGITA Yoshihiro
Fujitsu Laboratories Ltd.
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Yoshikawa K
Department Of Bioscience Faculty Of Bioresources Mie University
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Yoshikawa Kazuhiro
Toray Research Center Inc.
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SUGIYAMA Naoyuki
Toray Research Center, Inc.
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Yamamoto Tetsushi
Material And Life Science Graduate School Of Engineering Osaka University
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YAMAMOTO Takashi
Toray Research Center, Inc.
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IZUMI Yukiko
Toray Research Center, Inc.
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HASHIMOTO Hideki
Toray Research Center, Inc.
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Yoshikawa K
Toray Research Center Inc.
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Hashimoto H
The Dept. Of Electrical & Electronic System Kanazawa University
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Yamamoto T
Toray Research Center Inc.
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Sugiyama Naoyuki
Toray Research Center Inc.
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Sugita Y
Fujitsu Laboratories Ltd.
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Yoshida Kouji
Department Of Apple Research National Institute Of Fruit Tree Science
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Hashimoto H
Toray Research Center Inc.
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Hashimoto Hideki
Toray Research Center Inc.
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Yamamoto Takashi
Toray Research Center Inc., Otsu 520-8567, Japan
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