Synchrotron-Radiation-Induced Modification of Silicon Dioxide Film at Room Temperature : Beam Induced Physics and Chemistry
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1992-04-30
著者
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Nara Yasuo
Department Of Pharmacy School Of Pharmacy Shujitsu University
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Nara Yasuo
就実大学 薬学部応用薬学
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Nara Yasuo
武庫川女子大学
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Yamori Y
Institute For World Health Development Mukogawa Women's University
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Itakura T
Fujitsu Lab. Ltd. Atsugi Jpn
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SUGITA Yoshihiro
Fujitsu Laboratories Ltd.
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ITO Takashi
Fujitsu Laboratories Ltd.
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Nara Y
Univ. East Asia Shimonoseki Jpn
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Nara Yasuo
Fujitsu Laboratories Ltd.
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Sugita Yutaka
Research Institute Of Electrical Communication Tohoku University
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Sugita Yutaka
Hitachi Research Laboratory Hitachi Lid.
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Nakayama Noriaki
Fujitsu Laboratories Ltd.
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Nakayama Noriaki
Semiconductor Technology Academic Research Center (starc)
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Nakayama Noriaki
Department Of Advanced Materials Science And Engineering Faculty Of Engineering
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Nakayama Noriaki
Fujitsu Laboratories Lid.
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Sugita Y
Department Of Physics Toyama University
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