Three-Dimensional Elemental Analysis of Commercial 45nm Node Device with High-k/Metal Gate Stack by Atom Probe Tomography

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概要

• 論文の詳細を見る
• 2011-11-25

著者

• Inoue Koji

  Department of Cardiology, St.Mariannna University School of Medicine

• Nakagawa Yoshitsugu

  Toray Research Center Inc.

• Nakagawa Yoshitsugu

  Toray Research Center Co. Ltd.

• Toyama Takeshi

  The Oarai Center Institute For Materials Research Tohoku University

• Nagai Yasuyoshi

  The Oarai Center Institute For Materials Research Tohoku University

• Sugiyama Naoyuki

  Toray Research Center Inc.

• Kawasaki Naohiko

  Toray Research Center Inc.

• Hashimoto Hideki

  Toray Research Center Inc.

• Takamizawa Hisashi

  The Oarai Center Institute For Materials Research Tohoku University

• KITAMOTO Katsuyuki

  Toray Research Center, Inc.

• KATO Jun

  Toray Research Center, Inc.

• MIYAGI Takahiro

  Toray Research Center, Inc.

• SHIMIZU Yasuo

  The Oarai Center, Institute for Materials Research, Tohoku University

• KAREN Akiya

  Toray Research Center, Inc.

• Karen Akiya

  Toray Research Center Inc.

• Miyagi Takahiro

  Toray Research Center Inc.

• Kitamoto Katsuyuki

  Toray Research Center Inc.

• Shimizu Yasuo

  The Oarai Center Institute For Materials Research Tohoku University

• Kato Jun

  Toray Research Center Inc.

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