Kawasaki Naohiko | Toray Research Center Inc.
スポンサーリンク
概要
関連著者
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Kawasaki Naohiko
Toray Research Center Inc.
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Otsuka Yuji
Toray Research Center Inc.
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Ogawa Shinichi
Semiconductor Leading Edge Technologies Inc.
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Inoue Koji
Department of Cardiology, St.Mariannna University School of Medicine
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Nakagawa Yoshitsugu
Toray Research Center Inc.
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Nakagawa Yoshitsugu
Toray Research Center Co. Ltd.
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Toyama Takeshi
The Oarai Center Institute For Materials Research Tohoku University
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SHIMADA Miyoko
Semiconductor Leading Edge Technologies Inc. (Selete)
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Shimada Miyoko
Semiconductor Leading Edge Technologies Inc.
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KAWASAKI Naohiko
Toray Research Center, Inc.
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Nagai Yasuyoshi
The Oarai Center Institute For Materials Research Tohoku University
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Sugiyama Naoyuki
Toray Research Center Inc.
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Hashimoto Hideki
Toray Research Center Inc.
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Tanaka Isao
Department Of Internal Medicine Suzuka Kaisei Hospital
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Takamizawa Hisashi
The Oarai Center Institute For Materials Research Tohoku University
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KITAMOTO Katsuyuki
Toray Research Center, Inc.
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KATO Jun
Toray Research Center, Inc.
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MIYAGI Takahiro
Toray Research Center, Inc.
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SHIMIZU Yasuo
The Oarai Center, Institute for Materials Research, Tohoku University
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KAREN Akiya
Toray Research Center, Inc.
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Karen Akiya
Toray Research Center Inc.
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Miyagi Takahiro
Toray Research Center Inc.
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Kitamoto Katsuyuki
Toray Research Center Inc.
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Shimizu Yasuo
The Oarai Center Institute For Materials Research Tohoku University
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Kato Jun
Toray Research Center Inc.
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Ogawa Shinichi
Semiconductor Leading Edge Technologies, Inc., 16-1 Onogawa, Tsukuba, Ibaraki 305-8569, Japan
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Shimizu Yumiko
Toray Research Center, Inc., 3-3-7 Sonoyama, Otsu 520-8567, Japan
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Otsuka Yuji
Toray Research Center, Inc., 3-3-7 Sonoyama, Otsu 520-8567, Japan
著作論文
- Characterization of Low-k Interconnect Dielectrics by EELS
- Process-Induced Damage Characterization of Patterned Low-$\kappa$ Film Using Electron Energy Loss Spectroscopy Technique
- Three-Dimensional Elemental Analysis of Commercial 45nm Node Device with High-k/Metal Gate Stack by Atom Probe Tomography