Sensitivity of Ultrasonic Sensor Structures Having Multilayer Diaphragm Structure
スポンサーリンク
概要
- 論文の詳細を見る
Arrayed ultrasonic sensors utilizing a piezoelectric thin film (lead-zirconate-titanate film: Pb(Zr0.52Ti0.48)O3) are fabricated with multilayered diaphragm structures. The different thermal and elastic characteristics of each layer lead to residual stress during high-temperature deposition processes; consequently the resultant composite membrane is bowed. Here, we present the influence of the initial membrane deflection, which originates from residual stress, on the sensitivity of the sensor chips. Three types of sensor structure having different film thicknesses and constitutions are fabricated, which correspond to different sensitivities (82–98 μV/Pa). The sensitivity is mainly influenced by the initial membrane deflection. These results are discussed in relation to the stress generation in each composite membrane structure and PZT film properties.
- Japan Society of Applied Physicsの論文
- 2004-12-01
著者
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Inoue Koji
Department of Cardiology, St.Mariannna University School of Medicine
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Okuyama Masanori
Department Of Electrical Engineering Faculty Of Engineering Schience Osaka University
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Tanaka Tsunehisa
Department Of Information & Electronics Technology Research Institute Of Osaka Prefecture
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Yamasita Kaoru
Department of Information & Electronics, Technology Research Institute of Osaka Prefecture, 2-7-1 Ayumino, Izumi, Osaka 594-1157, Japan
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Inoue Koji
Department of Information & Electronics, Technology Research Institute of Osaka Prefecture, 2-7-1 Ayumino, Izumi, Osaka 594-1157, Japan
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Lee Seungmock
Department of Information & Electronics, Technology Research Institute of Osaka Prefecture, 2-7-1 Ayumino, Izumi, Osaka 594-1157, Japan
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Lee Seungmock
Department of Information & Electronics, Technology Research Institute of Osaka Prefecture, 2-7-1 Ayumino, Izumi, Osaka 594-1157, Japan
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Tanaka Tsunehisa
Department of Information & Electronics, Technology Research Institute of Osaka Prefecture, 2-7-1 Ayumino, Izumi, Osaka 594-1157, Japan
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