Optical Characterization of Gate Oxide Charging Damage by Photoreflectance Spectroscopy
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2000-04-30
著者
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WADA HIDEO
Department of Pediatrics, School of Medicine, Faculty of Medicine, Kanazawa University
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KANASHIMA Takeshi
Graduate School of Engineering Science, Osaka University
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OKUYAMA Masanori
Department of Electrical Engineering, Facully of Engineering Science, Osaka University
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Eriguchi K
Matsushita Electric Industrial Co. Ltd. Osaka Jpn
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Eriguchi Koji
Ulsi Process Technology Development Center Matsushita Electronics
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Fujimoto Akira
Department Of Electrical Engineering Wakayama National College Of Technology
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Fujimoto A
Wakayama National Coll. Technol. Wakayama Jpn
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Wada Hideo
Department Of Molecular And Laboratory Medicine Mie University Graduate School Of Medicine
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Wada Hideo
Japan Defense Agency
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Wada Hideo
Technical Research And Development Institute Japan Defense Agency
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KANASHIMA Takeshi
Department of Physical Science, Graduate School of Engineering Science, Osaka University
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MAIDA Osamu
Department of Physical Science, Graduate School of Engineering Science, Osaka University
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Okuyama Masanori
Department Of Electrical Engineering Faculty Of Engineering Schience Osaka University
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Kanashima Takeshi
Graduate School Of Engineering Science Osaka University
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Kanashima Takeshi
Department Of Electrical Engineering Faculty Of Engineering Science Osaka University
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Kanashima Takeshi
Division Of Advanced Electronics And Optical Science Department Of System Innovation Graduate School
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Wada H
Japan Defense Agency
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Agata Masashi
Area Of Materials And Device Physics Department Of Physical Science Graduate School Of Engineering S
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FUJIMOTO Akira
Dept. Electrical Engineering, Wakayama National College of Technology
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AGATA Masashi
Department of Physical Science, Graduate School of Engineering Science, Osaka University
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Fujimoto A
Department Of Electrical Engineering Wakayama National College Of Technology
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Okuyama M
Graduate School Of Engineering Science Osaka University
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Maida Osamu
Department Of Physical Science Graduate School Of Engineering Science Osaka University
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Agata Masashi
Department Of Physical Science Graduate School Of Engineering Science Osaka University
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Kanashima Takeshi
Area Of Materials And Device Physics Department Of Physical Science Graduate School Of Engineering S
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Wada Hideo
Department Of Internal Medicine Mie University School Of Medicine
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Eriguchi Koji
ULSI Process Tech. Dev. Ctr., Matsushita Electronics
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Wada Hideo
Department of Electronic Chemistry, Tokyo Institute of Technology at Nagatsuta
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