Bias Effect in Rf Sputtering of PbTiO_3 Thin Film : T: Thin Film
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1985-12-25
著者
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Hamakawa Yoshihiro
Department Of Electrical Engineering Faculty Of Engineering Science Osaka University
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OKUYAMA Masanori
Department of Electrical Engineering, Facully of Engineering Science, Osaka University
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Okuyama Masanori
Department Of Electrical Engineering Faculty Of Engineering Schience Osaka University
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Hamakawa Yoshihiro
Department Of Electrical Engineering Faculty Of Engineering Osaka University
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UEDA Toshiyuki
Department of Electrical Engineering, Faculty of Engineering Science, Osaka University
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Ueda T
Shizuoka Univ. Hamamatsu
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