(111) Preferred Oriented Pb(Zr,Ti)O3 Thick Films Prepared by Multilayer Process and Its Application to Ultrasonic Sensors
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概要
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We report the deposition of Pb(Zr0.52Ti0.48)O3 (PZT) thick films on Pt/Ti/SiO2/Si substrates using a multilayer process to suppress the problem of crack formation due to thermal stress. The thickness dependences of film structure, ferroelectric and dielectric properties were investigated over the thickness range of 0.24–4.6 μm. A strong (111) orientation was obtained from all films deposited in the experiments. For a constant applied field of 170 kV/cm, remanent polarization, $2P_{\text{r}}$ developed from 14 μC/cm2 to 60 μC/cm2, as film thickness increased from 0.24 to 4.6 μm. Dielectric constant also increased with film thickness, and reached the maximum value of 1300 at the thickness of 4.6 μm. These trends were interpreted in terms of the interfacial effect on the electrical characteristics. A thin-film-type ultrasonic sensor was fabricated by depositing a multilayered PZT thick film onto an SOI substrate having a membrane structure, and its characteristics are reported.
- 2004-10-15
著者
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Okuyama Masanori
Department Of Electrical Engineering Faculty Of Engineering Schience Osaka University
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Yamashita Kaoru
Department Of Biology School Of Eduction Waseda University
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SUZUKI Yoshihiko
Technology Research Institute of Osaka Prefecture
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Aoyagi Seiji
Department Of Industrial Engineering Kansai University
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TANAKA Tsunehisa
Technology Research Institute of Osaka Prefecture
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MIYOSHI Hiromi
Department of Industrial Engineering, Kansai University
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Teeramongkonrasmee Arporn
Department Of Electrical Engineering Chulalongkorn University
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Aoyagi Seiji
Department of Industrial Engineering, Kansai University, 3-3-65 Yamatechou, Suita-shi, Osaka 564-8680, Japan
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Yamashita Kaoru
Department of Physical Science, Osaka University, 1-3 Machikaneyamachou, Toyonaka-shi, Osaka 560-8531, Japan
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Miyoshi Hiromi
Department of Industrial Engineering, Kansai University, 3-3-65 Yamatechou, Suita-shi, Osaka 564-8680, Japan
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Tanaka Tsunehisa
Technology Research Institute of Osaka Prefecture, 2-7-1 Ayumino, Izumi-shi, Osaka 594-1157, Japan
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Teeramongkonrasmee Arporn
Department of Electrical Engineering, Chulalongkorn University, Payathai Rd., Patumwan, Bangkok 10330, Thailand
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Suzuki Yoshihiko
Technology Research Institute of Osaka Prefecture, 2-7-1 Ayumino, Izumi-shi, Osaka 594-1157, Japan
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