Lead Zirconate Titanate (PZT) Thin Film Deposition in Facing Target Sputtering
スポンサーリンク
概要
著者
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Li Xin-shan
Shanghai University China
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SUZUKI Yoshihiko
Technology Research Institute of Osaka Prefecture
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TANAKA Tsunehisa
Technology Research Institute of Osaka Prefecture
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Suzuki Yoshihiko
Technology Research Institute Of Osaka Prefecture Seis Project
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Tanaka Tsunehisa
Technology Research Institute Of Osaka Prefecture Seis Project
関連論文
- Infrared Radiation Detector with YBa_2Cu_3O_x Thin Film
- (111) Preferred Oriented Pb(Zr, Ti)O_3 Thick Films Prepared by Multilayer Process and Its Application to Ultrasonic Sensors
- Highly Oriented PZT Films Prepared by Multi-step Process and Its Applications to Ultrasonic Sensors
- Highly oriented PZT thin films prepared by facing target sputtering for piezoelectric sensors
- Seeding Effect of Ti-layer on Lead Zirconate Titanate(PZT) Thin Films Deposited by Facing Target Sputtering
- Lead Zirconate Titanate (PZT) Thin Film Deposition in Facing Target Sputtering
- (111) Preferred Oriented Pb(Zr,Ti)O3 Thick Films Prepared by Multilayer Process and Its Application to Ultrasonic Sensors
- Development of Capacitive Ultrasonic Sensor with Parylene Diaphragm Using Micromachining Technique