Highly Oriented PZT Films Prepared by Multi-step Process and Its Applications to Ultrasonic Sensors

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概要

• 論文の詳細を見る
• 2000-12-20

著者

• Inoue Kouji

  Technology Research Institute Of Osaka Prefecture

• AOYAGI Seiji

  Kansai University

• OKUYAMA Masanori

  Osaka Prefecture SEIS Project

• Yamashita Kaoru

  Department Of Physical Science Osaka University

• Miyoshi Hiromi

  Kansai University

• SUZUKI Yoshihiko

  Technology Research Institute of Osaka Prefecture

• Okuyama M

  Osaka Univ. Osaka Jpn

• Aoyagi Seiji

  Department Of Industrial Engineering Kansai University

• Inoue K

  Technol. Res. Inst. Osaka Prefecture

• Yamashita Kaoru

  Osaka Univ

• TEERAMONGKONRASMEE Arporn

  Department of Electrical Engineering, Chulalongkorn University

• TANAKA Tsunehisa

  Technology Research Institute of Osaka Prefecture

• TEERAMONGKONRASMEE Arporn

  Technology Research Institute of Osaka Prefecture

• Suzuki Y

  Department Of Biochemistry School Of Veterinary Medicine Azabu University

• Suzuki Yoshihiko

  Seis Project Technology Research Institute Of Osaka Prefecture

• Teeramongkonrasmee Arporn

  Department Of Electrical Engineering Chulalongkorn University

• Aoyagi Seiji

  Kansai Univ

• Tanaka Tsunehisa

  Seis Project Technology Research Institute Of Osaka Prefecture

関連論文

• Low-Temperature Growth of SiO_2 Thin Film by Photo-Induced Chemical Vapor Deposition Using Synchrotron Radiation
• Field-Excited Electron Emission frorn (1-y)Pb(Mg_Nb_)O_3-yPbTiO_3 Ceramic
• Combined Harpoonlike Jagged Microneedles Imitating Mosquito's Proboscis and Its Insertion Experiment with Vibration
• Strained SrTiO_3/ BaTiO_3 Superlattices Formed by Laser Ablation Technique and Their High Dielectric Properties
• Preparation of BST Ferroelectric Thin Film by Metal Organic Decomposition for Infrared Sensor
• Application of Ferroelectric BST Thin Film Prepared by MOD for Uncooled Infrared Sensor of Dielectric Bolometer Mode (特集:強誘電体薄膜材料とプロセス技術)
• Detector pixel in dielectric bolometer mode based on ferroelectric thin film capacitors for uncooled infrared image sensor
• Preparation of Pb(Zr_TiO_)O_3 Thin Films at Low-Temperature of Loss than 4000℃ by Hydrothermal Treatment Following Sol-Gel Deposition
• Low-temperature Crystallization of Metal Organic Decomposition BaTiO_3 Thin Film by Hydrothermal Annealing
• Ferroelectric Gate FET Memory based on Conduction of SBT-Silicon Oxide Interface
• Ultrasonic Vocalization Responses in Genetically High- and Low-Emotional Rats
• Electric and Pyroelectric Behaviors of PbTiO_3 Thin Films Formed by an Excimer Laser Ablation Technique
• Preparation of PbTiO_3 Thin Films by an Excimer Laser Ablation Technique with Second Laser Irradiation
• Resonant frequency variations relating with thermally induced stress on the ultrasonic transducers with multi-layered diaphragm structure
• Infrared Radiation Detector with YBa_2Cu_3O_x Thin Film
• Development of an Arrayed Tactile Sensor Having Four Stories and Recognition of Contact State Using Neural Networks
• アジュバント関節炎ラットにおける超音波発信反応の痛み評価への応用
• Effect of Anxiolytic Drugs on Air-Puff-Elicited Ultrasonic Vocalization in Adult Rats
• Investigation of Grain-Size Influence on the Ferroelectric-to-Paraelectric Phase Transition in BaTiO_3 Ceramics by Means of AC Calorimetry
• Simulation of Switching Properties of Ferroelectrics on the Basis of Dipole Lattice Model
• Grain Size Dependence of Switching Properties of Ferroelectric BaTiO_3 Ceramics
• Enhancement of Field-Excited Electron Emission from Lead-Zirconate-Titanate Ceramic Using Ultrathin Metal Electrode
• Oxygen and Fluorine Treatment Effect on Silicon Surface Characterized by Infrared Reflection Absorption Spectroscopy
• Electron Emission frorm Lead-Zirconate-Titanate Ferroelectric Ceramic Induced by Pulse Electric Field ( FERROELECTRIC MATERIALS AND THEIR APPLICATIONS)
• Electron Emission from PZT Ceramic by External Pulsed Electric Fields : Pulse Voltage Dependence of Emitted Charge
• Preparation of PbTiO_3 Thin Film on Si by ArF Excimer Baser Ablation
• Electron Emission into Vacuum from Lead-Zirconate-Titanate Ferroelectric Ceramics Induced by Polarization Reversal
• In-Situ Characterization of Si Surface Oxidation by High-Sensitivity Infrared Reflection Spectroscopic Method
• Field-Excited Electron Emission from Ferroelectric Ceramic in Vacuum
• High-Sensitivity Infrared Characterization of Ultrathin SiO_2 Film by Grazing Internal Reflection Method
• PbTiO_3 Thin Films Deposited by Laser Ablation : Thin Films
• Characterization of F_2 Treatment Effects on Si(100) Surface and Si(100)/SiO_3 Interface
• Analysis of Si-H, Si-O-H and Si-O-O-H Defects in SiO_2 Thin Film by Molecular Orbital Method
• Theoretical Analysis of Hydrogen-Related Defects in SiO_2 Thin Film by Molecular Orbital Method
• Development of Powerful Airborne Ultrasonic Transmitter for Robot Metrology : Ultrasonic Motor, Actuator and Transducer
• Development of Fast and Fine Position Control System of an Ultrasonic Motor : Ultrasonic Motor, Actuator and Transducer
• P3-31 Development of Capacitive Ultrasonic Sensor having Parylene Film by Micromachining Technique(Poster session 3)
• RECOGNITION OF CONTACT STATE BY USING NEURAL NETWORK FOR MICROMACHINED ARRAY TYPE TACTILE SENSOR
• Fabrication of Micro Accelerometer Using Screen Printed BaTiO_3 Film on a Ceramic Substrate and Its Characterization
• (111) Preferred Oriented Pb(Zr, Ti)O_3 Thick Films Prepared by Multilayer Process and Its Application to Ultrasonic Sensors
• 速報 Highly Oriented Pb(Zr,Ti)O3 Films Prepared by Multi-step Process
• Highly Oriented PZT Films Prepared by Multi-step Process and Its Applications to Ultrasonic Sensors
• Highly oriented PZT thin films prepared by facing target sputtering for piezoelectric sensors
• Seeding Effect of Ti-layer on Lead Zirconate Titanate(PZT) Thin Films Deposited by Facing Target Sputtering
• Lead Zirconate Titanate (PZT) Thin Film Deposition in Facing Target Sputtering
• Development of a silicon microneedle with three-dimensional sharp tip by electrochemical etching (特集 医療用MEMSデバイス)
• Design and Simulation of Inertial Force Sensor Using Mach-Zehnder Interferometer with Optical Waveguides Made of Crystal Silicon
• Development of MEMS Capacitive Sensor Using a MOSFET Structure
• Fabrication of MOSFET Capacitive Sensor using Spray Coating Method
• Development of a Capacitive Accelerometer Using Parylene (Part 2) : —Measurement Principle Using Fringe Electrical Field and Characterization—
• Development of a Capacitive Accelerometer Using Parylene (Part 1) : —Study on Resonant Frequency of Parylene Suspended Structure—
• Investigation of Fatigue Mechanisms in Pb(Zr, Ti)O_3 Films from a Correlated Analysis of Hysteresis Parameters in a Lattice Model with Distributed Polarization Clamping
• Fabrication of Lead Titanate Thin Film by Laser Ablation with Alternate Deposition of Lead Oxide and Titanium Oxide Precursors ( FERROELECTRIC MATERIALS AND THEIR APPLICATIONS)
• Preferentially (105)-Oriented SrBi2Ta2O9 Films Prepared by Laser Ablation Method
• Characterization of Charged Traps near Si-SiO_2 Interface in Photo-Induced Chemical Vapor Deposited SiO_2 Film
• Characterization of Charged Traps near Si-SiO_2 Interface in Photo-CVD SiO_2 Film
• Preparation of Bismuth Titanate Thin Films by Laser Ablation
• Preparation of SrBi_2Ta_2O_9 Films by Laser Ablation Method
• Bi_4Ti_3O_ Films Grown on SiO_2/Si at Low Temperature by Laser Ablation Method
• Characterization of Piezoelectric Property of Sol-Gel PZT Thin Films and Its Improvement by Poling
• Theoretical Analysis of Oxygen-Excess Defects in SiO_2 Thin Film by Molecular Orbital Method
• Photoluminescence and Its Excimer Laser Irradiation Effects in SiO_2 Film Prepared by Photo-Induced Chemical Vapor Deposition
• Buckling Control of Silicon Dioxide Diaphragms for Sensitivity Enhancement of Piezoelectric Ultrasonic Microsensors
• Effect of Dispersing Ag Micro Particles on Enhancing Surface Potential of CYTOP Electret Film
• Theoretical Analysis of Oxygen-Excess Defects in SiO2 Thin Film by Molecular Orbital Method
• Buckling Control of Silicon Dioxide Diaphragms for Sensitivity Enhancement of Piezoelectric Ultrasonic Microsensors
• Micromachined Arrayed Capacitive Ultrasonic Sensor/Transmitter with Parylene Diaphragms
• (111) Preferred Oriented Pb(Zr,Ti)O3 Thick Films Prepared by Multilayer Process and Its Application to Ultrasonic Sensors
• Development of Capacitive Ultrasonic Sensor with Parylene Diaphragm Using Micromachining Technique

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