Highly oriented PZT thin films prepared by facing target sputtering for piezoelectric sensors
スポンサーリンク
概要
- 論文の詳細を見る
- 1999-11-11
著者
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Li Xin-shan
Shanghai University China
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TANAKA Tsunehisa
SEIS Project, Technology Research Institute of Osaka Prefecture
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SUZUKI Yoshihiko
SEIS Project, Technology Research Institute of Osaka Prefecture
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Suzuki Yoshihiko
Seis Project Technology Research Institute Of Osaka Prefecture
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Suzuki Yoshihiko
Technology Research Institute Of Osaka Prefecture Seis Project
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LI Xin-Shan
SEIS Project of Osaka Prefecture, Shanghai Univ.
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Tanaka Tsunehisa
Seis Project Technology Research Institute Of Osaka Prefecture
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Tanaka Tsunehisa
Technology Research Institute Of Osaka Prefecture Seis Project
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- Highly oriented PZT thin films prepared by facing target sputtering for piezoelectric sensors
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