Development of Powerful Airborne Ultrasonic Transmitter for Robot Metrology : Ultrasonic Motor, Actuator and Transducer
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1992-05-31
著者
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Aoyagi Seiji
Department Of Industrial Engineering Kansai University
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Aoyagi Seiji
Faculty Of Engineering Kanazawa University
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Aoyagi Seiji
Faculty Of Engineering Department Of Industrial Engineering Kansai University
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KAMIYA Yoshitsugu
Faculty of Engineering, Kanazawa University
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OKABE Sakiichi
Faculty of Engineering, Kanazawa University
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Okabe Sakiichi
Faculty Of Engineering Kanazawa University
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Kamiya Y
Graduate School Of Natural Science & Technology Kanazawa University
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Kamiya Yoshitsugu
Faculty Of Engineering Kanazawa University
関連論文
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- Development of Fast and Fine Position Control System of an Ultrasonic Motor : Ultrasonic Motor, Actuator and Transducer
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- (111) Preferred Oriented Pb(Zr,Ti)O3 Thick Films Prepared by Multilayer Process and Its Application to Ultrasonic Sensors
- Development of Capacitive Ultrasonic Sensor with Parylene Diaphragm Using Micromachining Technique