High-sensitivity Surface Micromachinable Accelerometer Using a Ferroelectric Substrate and Its Characterization
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概要
- 論文の詳細を見る
- 2007-05-01
著者
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Aoyagi Seiji
Faculty Of Engineering Kanazawa University
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Aoyagi Seiji
Faculty Of Engineering Department Of Industrial Engineering Kansai University
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ISONO Yuichi
Faculty of Engineering, Department of Industrial Engineering, Kansai University
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Isono Yuichi
Faculty Of Engineering Department Of Industrial Engineering Kansai University
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- High-sensitivity Surface Micromachinable Accelerometer Using a Ferroelectric Substrate and Its Characterization
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