P3-31 Development of Capacitive Ultrasonic Sensor having Parylene Film by Micromachining Technique(Poster session 3)

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Combined Harpoonlike Jagged Microneedles Imitating Mosquito's Proboscis and Its Insertion Experiment with Vibration
Development of an Arrayed Tactile Sensor Having Four Stories and Recognition of Contact State Using Neural Networks
P3-31 Development of Capacitive Ultrasonic Sensor having Parylene Film by Micromachining Technique(Poster session 3)
Fabrication of Micro Accelerometer Using Screen Printed BaTiO_3 Film on a Ceramic Substrate and Its Characterization
Highly Oriented PZT Films Prepared by Multi-step Process and Its Applications to Ultrasonic Sensors
Development of a silicon microneedle with three-dimensional sharp tip by electrochemical etching (特集医療用MEMSデバイス)
Design and Simulation of Inertial Force Sensor Using Mach-Zehnder Interferometer with Optical Waveguides Made of Crystal Silicon
Development of MEMS Capacitive Sensor Using a MOSFET Structure
Fabrication of MOSFET Capacitive Sensor using Spray Coating Method
Development of a Capacitive Accelerometer Using Parylene (Part 2) : —Measurement Principle Using Fringe Electrical Field and Characterization—
Development of a Capacitive Accelerometer Using Parylene (Part 1) : —Study on Resonant Frequency of Parylene Suspended Structure—
Characterization of Piezoelectric Property of Sol-Gel PZT Thin Films and Its Improvement by Poling

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