Fabrication of Micro Accelerometer Using Screen Printed BaTiO_3 Film on a Ceramic Substrate and Its Characterization
スポンサーリンク
概要
- 論文の詳細を見る
The concept of MEMS sensors directly fabricated on a ceramic substrate, which can be used for a package of end product, was proposed. As one of such sensors, a micro accelerometer utilizing a fringe capacitance formed in a ferroelectric material was focused on. For this sensor, in stead of a previously used bulk PZT plate, a screen-printed BaTiO3 (BTO) film on a ceramic alumina substrate was herein employed. A screen-printing method can save the amount of raw material of the film, because a comparatively thick film can be deposited only on a specified area. Moreover, BTO does not contain harmful lead material. The optimal condition for fabricating a BTO film on an alumina substrate with minimum unwanted surface defects was experimentally searched. The number of defects was decreased by employing a metal barrier of Pt layer underneath BTO, and by setting the annealing temperature for crystallization to a higher value of 1,400°C. A comparatively high relative dielectric constant of εr =926 was achieved. An accelerometer using a BTO film was practically fabricated. The sensitivity of it was estimated as 0.1 pF/g, which is degraded a little compare with the previously developed accelerometer using a PZT plate; however, the order is same.
- 社団法人 電気学会の論文
- 2009-09-01
著者
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AOYAGI Seiji
Kansai University
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Kobayashi Yuta
Kansai University
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SUZUKI Masato
Kansai University
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TAJIRI Hiroyuki
ROHM CO., LTD.
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NAGAHATA Takaya
ROHM CO., LTD.
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Aoyagi Seiji
Kansai Univ
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Tajiri Hiroyuki
Rohm Co. Ltd.
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Nagahata Takaya
Rohm Co. Ltd.
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