Eriguchi K | Matsushita Electric Industrial Co. Ltd. Osaka Jpn
スポンサーリンク
概要
関連著者
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Eriguchi K
Matsushita Electric Industrial Co. Ltd. Osaka Jpn
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Eriguchi Koji
Ulsi Process Technology Development Center Matsushita Electronics
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Fujimoto Akira
Department Of Electrical Engineering Wakayama National College Of Technology
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Fujimoto A
Wakayama National Coll. Technol. Wakayama Jpn
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Kanashima Takeshi
Department Of Electrical Engineering Faculty Of Engineering Science Osaka University
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KANASHIMA Takeshi
Graduate School of Engineering Science, Osaka University
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Eriguchi Koji
Semiconductor Research Center Matsushita Electric Industrial Co. Ltd.
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Eriguchi Koji
Semiconductor Research Center Matsushita Electric Ind. Co. Ltd.
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Kanashima Takeshi
Graduate School Of Engineering Science Osaka University
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Kanashima Takeshi
Division Of Advanced Electronics And Optical Science Department Of System Innovation Graduate School
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Agata Masashi
Area Of Materials And Device Physics Department Of Physical Science Graduate School Of Engineering S
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FUJIMOTO Akira
Dept. Electrical Engineering, Wakayama National College of Technology
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Fujimoto A
Department Of Electrical Engineering Wakayama National College Of Technology
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Uraoka Yukiharu
Semiconductor Research Center, Matsushita Electric Industrial Co., Ltd.
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Okuyama M
Graduate School Of Engineering Science Osaka University
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Kanashima Takeshi
Area Of Materials And Device Physics Department Of Physical Science Graduate School Of Engineering S
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Uraoka Y
Nara Inst. Of Sci. And Technol. Nara Jpn
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Uraoka Yukiharu
Graduate School Of Materials Science Nara Institute Of Science And Technology
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Uraoka Yukiharu
Semiconductor Research Center Matsushita Electric Industrial Co. Ltd.
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Eriguchi Koji
ULSI Process Tech. Dev. Ctr., Matsushita Electronics
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Wada Hideo
Japan Defense Agency
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Wada Hideo
Technical Research And Development Institute Japan Defense Agency
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KANASHIMA Takeshi
Area of Materials and Device Physics, Department of Physical Science, Graduate School of Engineering
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AGATA Masashi
Area of Materials and Device Physics, Department of Physical Science, Graduate School of Engineering
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OKUYAMA Masanori
Area of Materials and Device Physics, Department of Physical Science, Graduate School of Engineering
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Wada H
Japan Defense Agency
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Kubota M
Opto-electronics Laboratories Oki Electric Industry Co. Ltd.
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KUBOTA Masafumi
Semiconductor Research Center, Matsushita Electric Industrial Co., Ltd.
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Tamaki Tokuhiko
Semiconductor Research Center, Matsushita Electric Industrial Co., Ltd.
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Kubota Masafumi
Semiconductor Research Center Matsushita Electric Industrial Co. Ltd.
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Maida Osamu
Department Of Physical Science Graduate School Of Engineering Science Osaka University
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Tamaki Tokuhiko
Semiconductor Research Center Matsushita Electric Industrial Co. Ltd.
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WADA HIDEO
Department of Pediatrics, School of Medicine, Faculty of Medicine, Kanazawa University
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SOHGAWA Masayuki
Graduate School of Engineering Science, Osaka University
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OKUYAMA Masanori
Department of Electrical Engineering, Facully of Engineering Science, Osaka University
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Arai M
Microsystem Research Center P&i Laboratories Tokyo Institute Of Technology
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Wada Hideo
Department Of Molecular And Laboratory Medicine Mie University Graduate School Of Medicine
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KANASHIMA Takeshi
Department of Physical Science, Graduate School of Engineering Science, Osaka University
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MAIDA Osamu
Area of Materials and Device Physics, Department of Physical Science, Graduate School of Engineering
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MAIDA Osamu
Department of Physical Science, Graduate School of Engineering Science, Osaka University
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NAKAGAWA Hideo
Semiconductor Company, Matsushita Electric Industrial Co. Ltd.
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Okuyama Masanori
Department Of Electrical Engineering Faculty Of Engineering Schience Osaka University
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Okuyama Masanori
Area Of Materials And Device Physics Department Of Physical Science Graduate School Of Engineering S
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Tsuji Kazuhiko
Semiconductor Research Laboratory
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Tsuji Kazuhiko
Semiconductor Research Center Matsushita Electric Industrial Co. Ltd.
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Yamashita Kaoru
Graduate School Of Science And Technology Kyoto Institute Of Technology
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Nomura Noboru
Semiconductor Research Center, Matsushita Electric Industrial Company, Ltd.
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Kanashima Takeshi
Area Of Materials And Device Physics Department Of Physical Science Graduate School Of Engineering S
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Azuchi Munechika
Microsystem Research Center Precision & Intelligence Laboratory Tokyo Institute Of Technology
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Maida Osamu
Area Of Materials And Device Physics Department Of Physical Science Graduate School Of Engineering S
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Nomura N
Semiconductor Research Center Matsushita Electric Industrial Company Ltd.
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Nomura Noboru
Semiconductor Research Center Matsushita Electric Industrial Co. Ltd.
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SOHGAWA Masayuki
Area of Advanced Electronics and Optical Science, Department of Systems Innovation, Graduate School
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OKUYAMA Masanori
Division of Advanced Electronics and Optical Science, Department of System Innovation, Graduate Scho
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YAMASHITA Kaoru
Area of Materials and Device Physics, Department of Physical Science, Graduate School of Engineering
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SOUGAWA Masayuki
Division of Advanced Electronics and Optical Science, Graduate School of Engineering Science, Osaka
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AGATA Masashi
Division of Advanced Electronics and Optical Science, Graduate School of Engineering Science, Osaka
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YAMASHITA Kaoru
Division of Advanced Electronics and Optical Science, Graduate School of Engineering Science, Osaka
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AGATA Masashi
Department of Physical Science, Graduate School of Engineering Science, Osaka University
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WADA Hideo
Area of Materials and Device Physics, Department of Physical Science, Graduate School of Engineering
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Arai Masatoshi
Semiconductor Research Center, Matsushita Electric Industrial Co., Ltd.
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Matsutani A
Microsystem Research Center Precision And Intelligence Laboratory Tokyo Institute Of Technology
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Matsutani Akihiro
Tokyo Inst. Technol. Yokohama Jpn
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Murakami A
Microsystem Research Center Precision & Intelligence Laboratory Tokyo Institute Of Technology
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Agata Masashi
Department Of Physical Science Graduate School Of Engineering Science Osaka University
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Sougawa Masayuki
Graduate School Of Engineering Science Osaka University
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Wada Hideo
Department Of Internal Medicine Mie University School Of Medicine
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Okuyama Masanori
Division Of Advanced Electronics And Optical Science Department Of Systems Innovation Graduate Schoo
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Okuyama Masanori
Area of Advanced Electronics and Optical Science, Department of Systems Innovation, Graduate School of Engineering Science, Osaka University, 1-3 Machikaneyama-cho, Toyonaka, Osaka 560-8531, Japan
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Okuyama Masanori
Division of Advanced Electrics and Optical Science, Department of Systems Innovation, Graduate School of Engineering Science, Osaka University, 1-3 Machikaneyama-cho, Toyonaka, Osaka 560-8531, Japan
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Kanashima Takeshi
Area of Advanced Electronics and Optical Science, Department of Systems Innovation, Graduate School of Engineering Science, Osaka University, 1-3 Machikaneyama-cho, Toyonaka, Osaka 560-8531, Japan
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Kanashima Takeshi
Division of Advanced Electrics and Optical Science, Department of Systems Innovation, Graduate School of Engineering Science, Osaka University, 1-3 Machikaneyama-cho, Toyonaka, Osaka 560-8531, Japan
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TSUJI Kazuhiko
Semiconductor Research Center, Matsushita Electric Industrial Co., Ltd.
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Wada Hideo
Department of Electronic Chemistry, Tokyo Institute of Technology at Nagatsuta
著作論文
- Nondestructive and Contactless Monitoring Technique of Si Surface Stress by Photoreflectance
- Non-Destructive and Contactless Monitoring Technique of Si Surface Stress by Photoreflectance
- Optical Characterization of Gate Oxide Charging Damage by Photoreflectance Spectroscopy
- Optical Characterization of Gate Oxide Charging Damage by Photoreflectance Spectroscopy
- Plasma-Induced Transconductance Degradation of nMOSFET with Thin Gate Oxide
- Evaluation of Plasma Damage to Gate Oxide (Special Issue on Quarter Micron Si Device and Process Technologies)
- Quantitative Evaluation of Gate Oxide Damage during Plasma Processing Using Antenna-Structure Capacitors