Kubota Masafumi | Semiconductor Research Center Matsushita Electric Industrial Co. Ltd.
スポンサーリンク
概要
関連著者
-
KUBOTA Masafumi
Semiconductor Research Center, Matsushita Electric Industrial Co., Ltd.
-
Kubota Masafumi
Semiconductor Research Center Matsushita Electric Industrial Co. Ltd.
-
Kubota M
Opto-electronics Laboratories Oki Electric Industry Co. Ltd.
-
Nomura Noboru
Semiconductor Research Center, Matsushita Electric Industrial Company, Ltd.
-
Nomura N
Semiconductor Research Center Matsushita Electric Industrial Company Ltd.
-
Nomura Noboru
Semiconductor Research Center Matsushita Electric Industrial Co. Ltd.
-
Harafuji Kenji
Semiconductor Research Center Matsushita Electric Industrial Co. Ltd.
-
Harafuji Kenji
Semiconductor Research Center Matsushita Electric Industrial Co.
-
Eriguchi K
Matsushita Electric Industrial Co. Ltd. Osaka Jpn
-
Eriguchi Koji
Semiconductor Research Center Matsushita Electric Industrial Co. Ltd.
-
Eriguchi Koji
Semiconductor Research Center Matsushita Electric Ind. Co. Ltd.
-
NAKAGAWA Hideo
Semiconductor Company, Matsushita Electric Industrial Co. Ltd.
-
Nakagawa Hideo
Association Of Super-advanced Electronics Technologies(aset)
-
Yamanaka Michinari
Semiconductor Research Center, Matsushita Electric Ind. Co., Ltd.
-
Yamanaka M
Electron Devices Division Electrotechnical Laboratory
-
Uraoka Yukiharu
Semiconductor Research Center, Matsushita Electric Industrial Co., Ltd.
-
Tamaki Tokuhiko
Semiconductor Research Center, Matsushita Electric Industrial Co., Ltd.
-
Uraoka Y
Nara Inst. Of Sci. And Technol. Nara Jpn
-
Uraoka Yukiharu
Graduate School Of Materials Science Nara Institute Of Science And Technology
-
Uraoka Yukiharu
Semiconductor Research Center Matsushita Electric Industrial Co. Ltd.
-
Tamaki Tokuhiko
Semiconductor Research Center Matsushita Electric Industrial Co. Ltd.
-
HARAFUJI Kenji
Semiconductor Research Center, Matsushita Electric Industrial Co., Ltd.
-
Yamanaka Michinari
Semiconductor Research Center, Matsushita Electric Ind. Co. Ltd.,
-
Fujita Tetsuo
Department Of Physics Nagoya University
-
Arai M
Microsystem Research Center P&i Laboratories Tokyo Institute Of Technology
-
Hayashi Shinji
Department Of Electrical And Electronic Engineering Faculty Of Engineering Kobe University
-
Fujita Tetsuo
Department Of Physics Faculty Of Science Nagoya University
-
ITOH Noriaki
Department of Physics, Faculty of Science, Nagoya University
-
Hayashi S
Department Of Electrical And Electronics Engineering Faculty Of Engineering Kobe University
-
Hayashi Shigenori
Central Research Laboratories Matsushita Electric Industrial Co. Ltd.
-
Hayashi Shigenori
Ulsi Process Technology Development Center Semiconductor Company Matsushita Electronics Corporation
-
Hayashi Shigenori
Semiconductor Equipment System Laboratory Hitachi Kokusai Electric Inc.
-
Hayashi Shigenori
Faculty Of Engineering Osaka University
-
Misaka Akio
Semiconductor Research Center Matsushita Electric Industrial Co. Ltd.
-
Fujita Tetsuo
Department Of Electronic Engineering Shizuoka Institute Of Science And Technology
-
NAKAYAMA Ichiro
Corporate Product Engineering Division, Matsushita Electric Industrial Co., Ltd.
-
NAKAGAWA Hideo
Association of Super-Advanced Electronics Technologies (ASET)
-
Azuchi Munechika
Microsystem Research Center Precision & Intelligence Laboratory Tokyo Institute Of Technology
-
Itoh Noriaki
Department Of Crystalline Materials Science Faculty Of Engineering Nagoya University
-
Itoh Noriaki
Department Of Physics Faculty Of Science Nagoya University
-
Arai Masatoshi
Semiconductor Research Center, Matsushita Electric Industrial Co., Ltd.
-
MIZUNO Bunji
Semiconductor Research Center, Matsushita Electric Industrial, Co., Ltd.
-
SAITOH Yasunobu
Department of Physics, Faculty of Science, Nagoya University
-
OHKUNI Mitsuhiro
Semiconductor Research Center, Matsushita Electric Industrial Co., Ltd.
-
SIVARAM Srinivasan
Semiconductor Research Center, Matsushita Electric Industrial Co., Ltd.
-
Matsutani A
Microsystem Research Center Precision And Intelligence Laboratory Tokyo Institute Of Technology
-
Matsutani Akihiro
Tokyo Inst. Technol. Yokohama Jpn
-
Mizuno Bunji
Semiconductor Research Center Matsushita Electric Industrial Co. Ltd.
-
Murakami A
Microsystem Research Center Precision & Intelligence Laboratory Tokyo Institute Of Technology
-
YAMANO Atsuhiro
Semiconductor Research Center, Matsushita Electric Industrial Co., Ltd.
-
Ohkuni Mitsuhiro
Semiconductor Research Center Matsushita Electric Industrial Co. Ltd.
-
Sivaram Srinivasan
Semiconductor Research Center Matsushita Electric Industrial Co. Ltd.:(present Address) Components R
-
Itoh Noriaki
Department Of Crystalline Material Science Faculty Of Engineering Nagoya University
-
Saitoh Yasunobu
Department Of Physics Faculty Of Science Nagoya University
-
Yamano Atsuhiro
Semiconductor Research Center Matsushita Electric Industrial Co. Ltd.
-
Nakayama Ichiro
Corporate Product Engineering Division Matsushita Electric Industrial Co. Ltd.
-
Nakayama Ichiro
Corporate Production Engineering Division Matsushita Electric Lndustrial Co. Ltd.
-
Fujita Tetsuo
Department of Applied Chemistry, Faculty of Engineering, Osaka University
著作論文
- Novel Surface Reaction Model in Dry-Etching Process Simulator
- Plasma-Induced Transconductance Degradation of nMOSFET with Thin Gate Oxide
- Quantitative Evaluation of Gate Oxide Damage during Plasma Processing Using Antenna-Structure Capacitors
- Electron Paramagnetic Resonance Studies of Defects in Oxygen-Implanted Silicon
- Radical Behavior in Inductively Coupled Fluorocarbon Plasma for SiO2 Etching
- RIE-Lag Reduction by NH_3 Addition in Aluminum Alloy Etching under BCl_3/Cl_2 Chemistry
- Lissajous Electron Plasma (LEP) Generation for Dry Etching
- RF Glow Discharge and Ion Transport : Effects of Applied Frequency, Gas Pressure and Method of Power Coupling