Novel Surface Reaction Model in Dry-Etching Process Simulator
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1992-12-30
著者
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Nomura Noboru
Semiconductor Research Center, Matsushita Electric Industrial Company, Ltd.
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Misaka Akio
Semiconductor Research Center Matsushita Electric Industrial Co. Ltd.
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Nomura N
Semiconductor Research Center Matsushita Electric Industrial Company Ltd.
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Nomura Noboru
Semiconductor Research Center Matsushita Electric Industrial Co. Ltd.
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Kubota M
Opto-electronics Laboratories Oki Electric Industry Co. Ltd.
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Harafuji Kenji
Semiconductor Research Center Matsushita Electric Industrial Co. Ltd.
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Harafuji Kenji
Semiconductor Research Center Matsushita Electric Industrial Co.
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KUBOTA Masafumi
Semiconductor Research Center, Matsushita Electric Industrial Co., Ltd.
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Kubota Masafumi
Semiconductor Research Center Matsushita Electric Industrial Co. Ltd.
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HARAFUJI Kenji
Semiconductor Research Center, Matsushita Electric Industrial Co., Ltd.
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