Submicron 3-Dimensional Structure Observation by Cyclotron SEM(Scanning Electron Microscope)

概要

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Experimental and numerical approaches have been taken to the study of the brightness of scanning electron microscope(SEM) images for bottom surfaces of deep holes and trenches by Cyclotron SEM. Secondary electrons emitted from the bottom are efficiently collected as an image signal by a couple of the following combinational effects. One is an electrostatic converging lens due to accumulated negative charges on the side wall of holes and trenches. The other i s a strong magnetic field above the specimen surface generated by an immersion-type objective lens. The former plays the role of reducing the number of electrons which collide with the side wall. The latter binds diverged secondary electrons leaving from the specimen surface and introduces electrons into a detector.
社団法人応用物理学会の論文
1991-11-30