Uraoka Y | Nara Inst. Of Sci. And Technol. Nara Jpn
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概要
関連著者
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Uraoka Y
Nara Inst. Of Sci. And Technol. Nara Jpn
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Uraoka Yukiharu
Graduate School Of Materials Science Nara Institute Of Science And Technology
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Eriguchi K
Matsushita Electric Industrial Co. Ltd. Osaka Jpn
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Eriguchi Koji
Semiconductor Research Center Matsushita Electric Industrial Co. Ltd.
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Eriguchi Koji
Semiconductor Research Center Matsushita Electric Ind. Co. Ltd.
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Uraoka Yukiharu
Semiconductor Research Center, Matsushita Electric Industrial Co., Ltd.
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Uraoka Yukiharu
Semiconductor Research Center Matsushita Electric Industrial Co. Ltd.
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URAOKA Yukiharu
Graduate School of Materials Science, Nara Institute of Science and Technology
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Kubota M
Opto-electronics Laboratories Oki Electric Industry Co. Ltd.
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Fuyuki Takashi
Graduate School Of Material Science Nara Institute Of Science And Technology
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KUBOTA Masafumi
Semiconductor Research Center, Matsushita Electric Industrial Co., Ltd.
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Tamaki Tokuhiko
Semiconductor Research Center, Matsushita Electric Industrial Co., Ltd.
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Kubota Masafumi
Semiconductor Research Center Matsushita Electric Industrial Co. Ltd.
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Tamaki Tokuhiko
Semiconductor Research Center Matsushita Electric Industrial Co. Ltd.
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Furuta Mamoru
Toshiba Matsushita Display Technology Co. Ltd.
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浦岡 行治
奈良先端科学技術大学院大
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FUYUKI Takashi
Graduate School of Materials Science, Nara Institute of Science and Technology
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Arai M
Microsystem Research Center P&i Laboratories Tokyo Institute Of Technology
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Yamamoto Y
College Of Engineering Hosei University
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Yamamoto Yuichi
Division Of Electronic And Information Engineering Faculty Of Technology Tokyo University Of Agricul
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Yamamoto Y
Nippon Steel Corp. Kawasaki Jpn
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NAKAGAWA Hideo
Semiconductor Company, Matsushita Electric Industrial Co. Ltd.
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Yamamoto Y
Nara Inst. Sci. And Technol. Nara Jpn
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Tsuji Kazuhiko
Semiconductor Research Laboratory
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Tsuji Kazuhiko
Semiconductor Research Center Matsushita Electric Industrial Co. Ltd.
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Nomura Noboru
Semiconductor Research Center, Matsushita Electric Industrial Company, Ltd.
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Yamamoto Yoshitugu
Department Of Chemistry For Materials Faculty Of Engineering Mie University
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Azuchi Munechika
Microsystem Research Center Precision & Intelligence Laboratory Tokyo Institute Of Technology
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Nomura N
Semiconductor Research Center Matsushita Electric Industrial Company Ltd.
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Nomura Noboru
Semiconductor Research Center Matsushita Electric Industrial Co. Ltd.
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YAMAMOTO Yukie
Graduate School of Materials Science, Nara Institute of Science and Technology
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Arai Masatoshi
Semiconductor Research Center, Matsushita Electric Industrial Co., Ltd.
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Matsutani A
Microsystem Research Center Precision And Intelligence Laboratory Tokyo Institute Of Technology
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Matsutani Akihiro
Tokyo Inst. Technol. Yokohama Jpn
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Murakami A
Microsystem Research Center Precision & Intelligence Laboratory Tokyo Institute Of Technology
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Fuyuki Takashi
Nara Inst. Sci. And Technol. Nara Jpn
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Yamamoto Y
Material Science Japan Advanced Institute Of Science And Technology
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Uraoka Yukiharu
Graduate School of Material Science, Nara Institute of Science and Technology, Takayama 8916-5, Ikoma, Nara 630-0192, Japan
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TSUJI Kazuhiko
Semiconductor Research Center, Matsushita Electric Industrial Co., Ltd.
著作論文
- Plasma-Induced Transconductance Degradation of nMOSFET with Thin Gate Oxide
- Evaluation of Plasma Damage to Gate Oxide (Special Issue on Quarter Micron Si Device and Process Technologies)
- Quantitative Evaluation of Gate Oxide Damage during Plasma Processing Using Antenna-Structure Capacitors
- Passivation Effect of Plasma Chemical Vapor Deposited SiNx on Single-Crystalline Silicon Thin-Film Solar Cells
- Reliability of Low-Temperature Poly-Si Thin Film Transistors with Lightly Doped Drain Structures