NAKAGAWA Hideo | Semiconductor Company, Matsushita Electric Industrial Co. Ltd.
スポンサーリンク
概要
関連著者
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NAKAGAWA Hideo
Semiconductor Company, Matsushita Electric Industrial Co. Ltd.
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Nomura Noboru
Semiconductor Research Center Matsushita Electric Industrial Co. Ltd.
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TOKUYAMA Yusuke
Department of Materials Engineering, School of Engineering, The University of Tokyo
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Nomura Noboru
Semiconductor Research Center, Matsushita Electric Industrial Company, Ltd.
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Kikuchi Jun
Axiomatec Inc.
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Nomura N
Semiconductor Research Center Matsushita Electric Industrial Company Ltd.
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Kubota M
Opto-electronics Laboratories Oki Electric Industry Co. Ltd.
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KUBOTA Masafumi
Semiconductor Research Center, Matsushita Electric Industrial Co., Ltd.
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Kubota Masafumi
Semiconductor Research Center Matsushita Electric Industrial Co. Ltd.
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OGAWA Hiroki
Department of Surgery, Otsu Red Cross Hospital
著作論文
- Study on the Mechanisms of Chemical Mechanical Polishing on Copper and Aluminum Surfaces Employing In Situ Infrared Spectroscopy
- Quantitative Evaluation of Gate Oxide Damage during Plasma Processing Using Antenna-Structure Capacitors
- RIE-Lag Reduction by NH_3 Addition in Aluminum Alloy Etching under BCl_3/Cl_2 Chemistry
- A Novel High-Resolution Scanning Electron Microscope for the Surface Analysis of High-Aspect-Ratio Three-Dimensional Structures
- Study on the Mechanisms of Chemical Mechanical Polishing on Copper and Aluminum Surfaces Employing In Situ Infrared Spectroscopy
- Development Methods for Submicron Optical Lithography