Nakagawa Hideo | Semiconductor Company, Matsushita Electric Industrial Co. Ltd., 19, Nishikujyo-Kasugacho, Minami-ku, Kyoto 601-8413, Japan

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概要

関連著者

TOKUYAMA Yusuke
Department of Materials Engineering, School of Engineering, The University of Tokyo
NAKAGAWA Hideo
Semiconductor Company, Matsushita Electric Industrial Co. Ltd.
Horiike Yasuhiro
Department Of Electrical & Electronics Engineering Tokyo University
Kikuchi Jun
Axiomatec Inc.
Yanagisawa Michihiko
Speedfam Co. Ltd.
Ogawa Hiroki
Department Of Electrical And Computer Engineering Nagoya Institute Of Technology:(present Address) N
Nakagawa Hideo
Semiconductor Company, Matsushita Electric Industrial Co. Ltd., 19, Nishikujyo-Kasugacho, Minami-ku, Kyoto 601-8413, Japan
Tokuyama Yusuke
Department of Materials Engineering, School of Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8656, Japan
Ogawa Hiroki
Department of Materials Engineering, School of Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8656, Japan
Yanagisawa Michihiko
Speedfam Co., Ltd., 2647 Hayakawa, Ayase, Kanagawa 252-1123, Japan
Ogawa Hiroki
Department of Chemistry, School of Science and Engineering, Waseda University

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著作論文

Study on the Mechanisms of Chemical Mechanical Polishing on Copper and Aluminum Surfaces Employing In Situ Infrared Spectroscopy

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