NAKAGAWA Hideo | Association of Super-Advanced Electronics Technologies (ASET)
スポンサーリンク
概要
関連著者
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NAKAGAWA Hideo
Association of Super-Advanced Electronics Technologies (ASET)
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Hayashi Shinji
Department Of Electrical And Electronic Engineering Faculty Of Engineering Kobe University
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Hayashi S
Department Of Electrical And Electronics Engineering Faculty Of Engineering Kobe University
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Hayashi Shigenori
Central Research Laboratories Matsushita Electric Industrial Co. Ltd.
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Hayashi Shigenori
Ulsi Process Technology Development Center Semiconductor Company Matsushita Electronics Corporation
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Hayashi Shigenori
Faculty Of Engineering Osaka University
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Kubota M
Opto-electronics Laboratories Oki Electric Industry Co. Ltd.
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Nakagawa Hideo
Association Of Super-advanced Electronics Technologies(aset)
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Yamanaka M
Electron Devices Division Electrotechnical Laboratory
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Inoue M
Department Of Electrical Engineering Osaka Prefectural Technical College
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Inoue M
Osaka Inst. Technol. Osaka Jpn
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Inoue Mitsuteru
Department Of Electrical & Electronic Engineering. Toyohashi University Of Technology
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Inoue M
Setsunan Univ. Osaka Jpn
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Noda S
Assoc. Super‐advanced Electronics Technol. (aset) Yokohama Jpn
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Noda Shoji
Toyota Central Research And Development Labs
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Inoue Masami
Association Of Super-advanced Electronics Technologies (aset)
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Inoue M
Assoc. Super‐advanced Electronics Technol. (aset) Yokohama Jpn
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Inoue M
Kagoshima Univ. Kagoshima Jpn
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Inoue M
Nanomaterials Microdevices Research Center Osaka Institute Of Technology
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Inoue M
Kyoto Univ. Kyoto Jpn
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Inoue Masumi
Department Of Quantum Engineering Nagoya University
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Noda S
Assoc. Super‐advanced Electronics Technol. Kanagawa Jpn
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YAMANAKA Michinari
ULSI Process Technology Development Center, Matsushita Electric Industrial Co., Ltd.
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Inoue Masataka
Nanomaterials Microdevices Research Center Osaka Institute Of Technology
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Inoue M
Advanced Technology R&d Center Mitsubishi Electric Corp.
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INOUE Morio
Kyoto Research Laboratory, Matsushita Electronics Corporation
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Noda Shuichi
Association Of Super-advanced Electronics Technologies (aset):(present Address)vlsi R&d Center O
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Noda Syuichi
Oki Electric Industry Co. Ltd.
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Hayashi Shigenori
Semiconductor Equipment System Laboratory Hitachi Kokusai Electric Inc.
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Hayashi Shigenori
Ulsi Process Technology Development Center Semiconductor Company Matsushita Electric Industrial Co.
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OKIGAWA Mitsuru
Association of Super-Advanced Electronics Technologies (ASET)
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MORISHITA Satoshi
Association of Super-Advanced Electronics Technologies (ASET)
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NODA Syuichi
Association of Super-Advanced Electronics Technologies (ASET)
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HAYASHI Hisataka
Association of Super-Advanced Electronics Technologies (ASET)
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ITO Katsuyuki
Matsushita Electric Industrial Co., Ltd., Corporate Production Engineering Division
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SEKINE Makoto
Association of Super-Advanced Electronics Technologies (ASET)
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Hayashi H
Association Of Super-advanced Electronics Technologies (aset):(present Address)process & Manufac
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Sekine M
Association Of Super-advanced Electronics Technologies (aset):(present Address)process & Manufac
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Yamanaka Michinari
Semiconductor Research Center, Matsushita Electric Ind. Co., Ltd.
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Yamanaka Michinari
Ulsi Process Technology Development Center Matsushita Electric Industrial Co. Ltd.
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KUBOTA Masafumi
Semiconductor Research Center, Matsushita Electric Industrial Co., Ltd.
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KUBOTA Masafumi
ULSI Process Technology Development Center, Semiconductor Company, Matsushita Electronics Corporatio
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Morishita Shunsuke
Association Of Super-advanced Electronics Technologies (aset):(present Address)advanced Technology R
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Ieda M
Department Of Electrical Engineering Nagoya University
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Okigawa Mitsuru
Association Of Super-advanced Electronics Technologies (aset):(present Address)system Lsi Division C
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Ito Katsuyuki
Matsushita Electric Industrial Co. Ltd. Corporate Production Engineering Division
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Kubota Masafumi
Semiconductor Research Center Matsushita Electric Industrial Co. Ltd.
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Kubota Masafumi
Ulsi Process Technology Development Center Matsushita Electronics Corporation
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Ieda M
Department Of Electrical Engineering Nagoya University:(present Address) Department Of Electrical En
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Nakagawa Hideo
Association Of Super-advanced Electronics Technologies (aset):(present Address)ulsi Process Technolo
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Yamanaka Michinari
Semiconductor Research Center, Matsushita Electric Ind. Co. Ltd.,
著作論文
- CF and CF_2 Radical Densities in 13.56-MHz CHF_3/Ar Inductively Coupled Plasma(Nuclear Science, Plasmas, and Electric Discharges)
- Highly Selective SiO2 Etching Using Inductively Coupled Plasma Source with a Multispiral Coil
- Radical Behavior in Inductively Coupled Fluorocarbon Plasma for SiO2 Etching