Hayashi Shigenori | Ulsi Process Technology Development Center Semiconductor Company Matsushita Electric Industrial Co.
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概要
- 同名の論文著者
- Ulsi Process Technology Development Center Semiconductor Company Matsushita Electric Industrial Co. の論文著者
関連著者
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Hayashi Shigenori
Ulsi Process Technology Development Center Semiconductor Company Matsushita Electric Industrial Co.
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Hayashi Shigenori
Ulsi Process Technology Development Center Semiconductor Company Matsushita Electronics Corporation
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Hayashi Shinji
Department Of Electrical And Electronic Engineering Faculty Of Engineering Kobe University
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YAMANAKA Michinari
ULSI Process Technology Development Center, Matsushita Electric Industrial Co., Ltd.
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Hayashi S
Department Of Electrical And Electronics Engineering Faculty Of Engineering Kobe University
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Hayashi Shigenori
Central Research Laboratories Matsushita Electric Industrial Co. Ltd.
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Hayashi Shigenori
Faculty Of Engineering Osaka University
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Kubota M
Opto-electronics Laboratories Oki Electric Industry Co. Ltd.
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Yamanaka M
Electron Devices Division Electrotechnical Laboratory
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Yamanaka Michinari
Ulsi Process Technology Development Center Matsushita Electric Industrial Co. Ltd.
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KUBOTA Masafumi
ULSI Process Technology Development Center, Semiconductor Company, Matsushita Electronics Corporatio
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Kubota Masafumi
Ulsi Process Technology Development Center Matsushita Electronics Corporation
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Niwa Masaaki
Ulsi Process Technology Development Center Semiconductor Company Matsushita Electric Industrial Co.
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Ogura M
Jst‐crest Ibaraki Jpn
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Miya Hironobu
Semiconductor Equipment Division Hitachi Kokusai Electric Inc.
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Ogura Masahiko
Energy Technology Research Institute National Institute Of Advanced Industrial Science And Technolog
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Horii Sadayoshi
Semiconductor Equipment System Laboratory Hitachi Kokusai Electric Inc.
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OGURA Mototsugu
ULSI Process Technology Development Center, Semiconductor Company, Matsushita Electronics Corporatio
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Asai Masayuki
Semiconductor Equipment System Laboratory Hitachi Kokusai Electric Inc.
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Yamamoto Kazuhiko
ULSI Process Technology Development Center, Matsushita Electric Industrial Co., Ltd.
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堀田 将
北陸先端科学技術大学院大学材料科学研究科
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Aoi Nobuo
Ulsi Process Technology Development Center Semiconductor Company Matsushita Electronics Corporation
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YAMAMOTO Kazuhiko
ULSI Process Technology Development Center, Semiconductor Company, Matsushita Electronics Corporatio
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Niwa M
Matsushita Electronics Corp. Kyoto Jpn
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NIWA Masaaki
ULSI Process Technology Development Center, Matsushita Electronics Corp.
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Hayashi Shigenori
Semiconductor Equipment System Laboratory Hitachi Kokusai Electric Inc.
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HORII Sadayoshi
Semiconductor Equipment System Laboratory, Hitachi Kokusai Electric Inc.
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NAKAGAWA Hideo
Association of Super-Advanced Electronics Technologies (ASET)
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Niwa M
Ulsi Process Technology Development Center Matsushita Electronics Corp.
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Niwa M
Department Of Materials Science And Engineering Tokyo Denki University
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Miya Hironobu
Semiconductor Equipment System Laboratory Hitachi Kokusai Electric Inc.
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Nakagawa Hideo
Association Of Super-advanced Electronics Technologies(aset)
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ASAI Masayuki
Semiconductor Equipment System Laboratory, Hitachi Kokusai Electric Inc.
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KANEKO Isao
Specialty Chemicals Research Center, Shin-Etsu Chemical Co., Ltd.
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ISHIHARA Toshinobu
Specialty Chemicals Research Center, Shin-Etsu Chemical Co., Ltd.
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Kaneko Isao
Specialty Chemicals Research Center Shin-etsu Chemical Co. Ltd.
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Ishihara Toshinobu
Specialty Chemicals Research Center Shin-etsu Chemical Co. Ltd.
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Asai Masayuki
Semiconductor Equipment System Laboratory, Hitachi Kokusai Electric Inc., 2-1 Yasuuchi, Yatsuo-Machi, Nei-gun, Toyama 939-2393, Japan
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Yamamoto Kazuhiko
ULSI Process Technology Development Center, Matsushita Electric Industrial Co., Ltd., 19 Nishikujo-Kasugacho, Minami-ku, Kyoto 601-8413, Japan
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Yamamoto Kazuhiko
ULSI Process Technology Development Center, Semiconductor Company, Matsushita Electric Industrial Co., Ltd., 19 Nishikujo-Kasugacho, Minami-ku, Kyoto 601-8413, Japan
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Niwa Masaaki
ULSI Process Technology Development Center, Semiconductor Company, Matsushita Electric Industrial Co., Ltd., 19 Nishikujo-Kasugacho, Minami-ku, Kyoto 601-8413, Japan
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Miya Hironobu
Semiconductor Equipment System Laboratory, Hitachi Kokusai Electric Inc., 2-1 Yasuuchi, Yatsuo-Machi, Nei-gun, Toyama 939-2393, Japan
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Hayashi Shigenori
ULSI Process Technology Development Center, Semiconductor Company, Matsushita Electric Industrial Co., Ltd., 19 Nishikujo-Kasugacho, Minami-ku, Kyoto 601-8413, Japan
著作論文
- Metal-Organic Chemical Vapor Deposition of HfO_2 by Alternating Supply of Tetrakis-Diethylamino-Hafnium and Remote-Plasma Oxygen
- Contact Hole Etch Scaling toward 0.1 μm
- Spatial and Temporal Behavior of Radicals in Inductively Coupled Plasm for SiO_2 Etching
- Highly Selective SiO2 Etching Using Inductively Coupled Plasma Source with a Multispiral Coil
- Impact of Hf Metal Predeposition on the Properties of HfO2 Grown by Physical and Chemical Vapor Deposition