Miya Hironobu | Semiconductor Equipment System Laboratory Hitachi Kokusai Electric Inc.
スポンサーリンク
概要
関連著者
-
Miya Hironobu
Semiconductor Equipment System Laboratory Hitachi Kokusai Electric Inc.
-
堀田 将
北陸先端科学技術大学院大学材料科学研究科
-
YAMAMOTO Kazuhiko
ULSI Process Technology Development Center, Semiconductor Company, Matsushita Electronics Corporatio
-
NIWA Masaaki
ULSI Process Technology Development Center, Matsushita Electronics Corp.
-
HORII Sadayoshi
Semiconductor Equipment System Laboratory, Hitachi Kokusai Electric Inc.
-
Miya Hironobu
Semiconductor Equipment Division Hitachi Kokusai Electric Inc.
-
ASAI Masayuki
Semiconductor Equipment System Laboratory, Hitachi Kokusai Electric Inc.
-
TAKAHAGI Takayuki
Graduate School of Advanced Sciences of Matter, Hiroshima University
-
Niwa M
Matsushita Electronics Corp. Kyoto Jpn
-
Hayashi Shigenori
Ulsi Process Technology Development Center Semiconductor Company Matsushita Electronics Corporation
-
Hayashi Shigenori
Semiconductor Equipment System Laboratory Hitachi Kokusai Electric Inc.
-
Hayashi Shigenori
Ulsi Process Technology Development Center Semiconductor Company Matsushita Electric Industrial Co.
-
Niwa M
Ulsi Process Technology Development Center Matsushita Electronics Corp.
-
Niwa M
Department Of Materials Science And Engineering Tokyo Denki University
-
Niwa Masaaki
Ulsi Process Technology Development Center Semiconductor Company Matsushita Electric Industrial Co.
-
KANEKO Isao
Specialty Chemicals Research Center, Shin-Etsu Chemical Co., Ltd.
-
ISHIHARA Toshinobu
Specialty Chemicals Research Center, Shin-Etsu Chemical Co., Ltd.
-
Horii Sadayoshi
Semiconductor Equipment System Laboratory Hitachi Kokusai Electric Inc.
-
SASAJIMA Ryota
Semiconductor Equipment Division, Hitachi Kokusai Electric Inc.
-
TAKAMI Eiko
Semiconductor Equipment Division, Hitachi Kokusai Electric Inc.
-
NAKAMURA Naoto
Semiconductor Equipment Division, Hitachi Kokusai Electric Inc.
-
Takami Eiko
Semiconductor Equipment Division Hitachi Kokusai Electric Inc.
-
Kaneko Isao
Specialty Chemicals Research Center Shin-etsu Chemical Co. Ltd.
-
Asai Masayuki
Semiconductor Equipment System Laboratory Hitachi Kokusai Electric Inc.
-
Ishihara Toshinobu
Specialty Chemicals Research Center Shin-etsu Chemical Co. Ltd.
-
Takahagi Takayuki
Graduate School of Advance Science of Matter, Hiroshima University, 1-3 Kagamiyama, Higashi-Hiroshima, Hiroshima 739-8526, Japan
-
Takami Eiko
Semiconductor Equipment Division, Hitachi Kokusai Electric Inc., 2-1 Yasuuchi, Yatsuo-machi, Nei-gun, Toyama 939-2393, Japan
-
Miya Hironobu
Semiconductor Equipment Division, Hitachi Kokusai Electric Inc., 2-1 Yasuuchi, Yatsuo-machi, Nei-gun, Toyama 939-2393, Japan
-
Yamamoto Kazuhiko
ULSI Process Technology Development Center, Matsushita Electric Industrial Co., Ltd.
著作論文
- Metal-Organic Chemical Vapor Deposition of HfO_2 by Alternating Supply of Tetrakis-Diethylamino-Hafnium and Remote-Plasma Oxygen
- Metalorganic Chemical Vapor Deposition of HfO_2 Films through the Alternating Supply of Tetrakis(1-methoxy-2-methyl-2-propoxy)-Hafnium and Remote-Plasma Oxygen
- Adsorption of Dibutyl Phthalate and Dioctyl Phthalate on Si Substrate