HORII Sadayoshi | Semiconductor Equipment System Laboratory, Hitachi Kokusai Electric Inc.
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概要
- Horii Sadayoshiの詳細を見る
- 同名の論文著者
- Semiconductor Equipment System Laboratory, Hitachi Kokusai Electric Inc.の論文著者
関連著者
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堀田 将
北陸先端科学技術大学院大学材料科学研究科
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HORII Sadayoshi
Semiconductor Equipment System Laboratory, Hitachi Kokusai Electric Inc.
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URAOKA Yukiharu
Graduate School of Materials Science, Nara Institute of Science and Technology
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FUYUKI Takashi
Graduate School of Materials Science, Nara Institute of Science and Technology
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YAMAMOTO Kazuhiko
ULSI Process Technology Development Center, Semiconductor Company, Matsushita Electronics Corporatio
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PUNCHAIPETCH Prakaipetch
Graduate School of Materials Science, Nara Institute of Science and Technology
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NIWA Masaaki
ULSI Process Technology Development Center, Matsushita Electronics Corp.
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Miya Hironobu
Semiconductor Equipment System Laboratory Hitachi Kokusai Electric Inc.
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ASAI Masayuki
Semiconductor Equipment System Laboratory, Hitachi Kokusai Electric Inc.
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Horii Sadayoshi
Semiconductor Equipment System Laboratory Hitachi Kokusai Electric Inc.
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OKAMOTO Takeshi
Graduate School of Systems and Information Engineering, University of Tsukuba
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浦岡 行治
奈良先端科学技術大学院大
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Sameshima Toshiyuki
Tokyo University Of Agriculture And Technology
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Niwa M
Matsushita Electronics Corp. Kyoto Jpn
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Hayashi Shigenori
Ulsi Process Technology Development Center Semiconductor Company Matsushita Electronics Corporation
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Hayashi Shigenori
Semiconductor Equipment System Laboratory Hitachi Kokusai Electric Inc.
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Hayashi Shigenori
Ulsi Process Technology Development Center Semiconductor Company Matsushita Electric Industrial Co.
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Sameshima Toshiyuki
Tokyo A&t University
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MIYASHITA Makoto
Graduate School of Materials Science, Nara Institute of Science and Technology
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Niwa M
Ulsi Process Technology Development Center Matsushita Electronics Corp.
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Niwa M
Department Of Materials Science And Engineering Tokyo Denki University
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Niwa Masaaki
Ulsi Process Technology Development Center Semiconductor Company Matsushita Electric Industrial Co.
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Miya Hironobu
Semiconductor Equipment Division Hitachi Kokusai Electric Inc.
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KANEKO Isao
Specialty Chemicals Research Center, Shin-Etsu Chemical Co., Ltd.
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ISHIHARA Toshinobu
Specialty Chemicals Research Center, Shin-Etsu Chemical Co., Ltd.
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Fuyuki Takashi
Graduate School Of Material Science Nara Institute Of Science And Technology
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NAKAMURA Hideki
Graduate School of Materials Science, Nara Institute of Science and Technology
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Kaneko Isao
Specialty Chemicals Research Center Shin-etsu Chemical Co. Ltd.
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Asai Masayuki
Semiconductor Equipment System Laboratory Hitachi Kokusai Electric Inc.
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Ishihara Toshinobu
Specialty Chemicals Research Center Shin-etsu Chemical Co. Ltd.
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Uraoka Yukiharu
Graduate School Of Materials Science Nara Institute Of Science And Technology
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Miyashita Makoto
Graduate School Of Materials Science Nara Institute Of Science And Technology
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Punchaipetch Prakaipetch
Graduate School Of Materials Science Nara Institute Of Science And Technology
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Fuyuki Takashi
Nara Inst. Sci. And Technol. Nara Jpn
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Uraoka Yukiharu
Graduate School of Material Science, Nara Institute of Science and Technology, Takayama 8916-5, Ikoma, Nara 630-0192, Japan
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Yamamoto Kazuhiko
ULSI Process Technology Development Center, Matsushita Electric Industrial Co., Ltd.
著作論文
- Improving High-κ Gate Dielectric Properties by High-Pressure Water Vapor Annealing
- Metal-Organic Chemical Vapor Deposition of HfO_2 by Alternating Supply of Tetrakis-Diethylamino-Hafnium and Remote-Plasma Oxygen
- Metalorganic Chemical Vapor Deposition of HfO_2 Films through the Alternating Supply of Tetrakis(1-methoxy-2-methyl-2-propoxy)-Hafnium and Remote-Plasma Oxygen
- Effect of Nitrogen on Electrical and Physical Properties of Polyatomic Layer Chemical Vapor Deposition HfSi_xO_y Gate Dielectrics