Effects of Reaction Product During Hydrogenation of Si Surfaces in HF Solution
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1998-03-30
著者
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SUGITA Yoshihiro
Fujitsu Laboratories Ltd.
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WATANABE Satoru
Fujitsu Laboratories Ltd.
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Sugita Yutaka
Research Institute Of Electrical Communication Tohoku University
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Watanabe Satoru
Fujita Health University
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