Observation of Microdefects in As-Grown Czochralski Silicon Crystals by Synchrotron Radiation Topography

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1993-07-15

著者

• IIDA Satoshi

  Department of Physics,Kwansei-Gakuin University

• Kawata Hiroshi

  Photon Factory, National Laboratory for High Energy Physics

• Abe Tomoki

  Department Of Electrical And Electronic Engineering Faculty Of Engineering Tottori University

• Iida S

  Nagaoka Univ. Technol. Nagaoka Jpn

• Aoki Yasushi

  Japan Atomic Energy Research Institute

• Kawata Hiroshi

  Photon Factory Institute Of Materials Structure Science

• Abe T

  Seh Isobe R&d Center Shin-etsu Handotai Co. Ltd.

• Abe Takao

  Shin-etsu Handotai

• Abe Takao

  Shin-etsu Handotai Company

• Abe Takao

  Seh R&d Center Shin-etsu Handotai Co. Ltd.

• Sugita Yutaka

  Research Institute Of Electrical Communication Tohoku University

• Sugita Yutaka

  Hitachi Research Laboratory Hitachi Lid.

• Iida S

  Toyama Univ. Toyama Jpn

• Iida Shinya

  Speedfam Co. Ltd.

• Iida Satoshi

  Department Of Orthopaedic Surgery Matsudo City Hospital

• Sugita Y

  Department Of Physics Toyama University

• Kawata H

  Department Of Physics And Electronics Gra4uate School Of Engineering Osaka Prefecture University

• AOKI Yoshirou

  Department of Physics, Toyama University

• SUGITA Yoshimitsu

  Department of Physics, Toyama University

• ABE Takao

  SEH Isobe R&D Center, Shin-Etsu Handotai Co., Ltd.

• OKITSU Kouhei

  Department of Physics, Toyanta University

• TSUNEDA Masayuki

  Department of Physics, Toyama University

• TAKENO Hiroshi

  SEH Isobe R & D Center, Shin-Etsu Handotai Co., Ltd.

• Aoki Y

  Advanced Technology Research Center Kanagawa Institute Of Technology

• Abe T

  Department Of Electrical And Electronic Engineering Faculty Of Engineering Tottori University

• Okitsu K

  Toyota Technological Inst. Nagoya Jpn

• Takeno H

  Kobe Univ. Kobe Jpn

• KAWATA Haruo

  Fujitsu Laboratories Limited

• Iida Satoshi

  Department Of Orthopaedic Surgery Chiba University

• Tsuneda Masayuki

  Department Of Physics Toyama University

• Sugita Yoshimitsu

  Department Of Physics Toyama University

• Aoki Yoshirou

  Department of Electrical and Electric Engineering, Kanagawa Institute of Technology

• Abe Takao

  SEH Isobe R&D Center, Shin-Etsu Handotai Co., Ltd., 2-13-1 Isobe, Annaka, Gunma 379-01, Japan

• Okitsu Kouhei

  Department of Physics, Toyama University, 3190 Gofuku, Toyama 930, Japan

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