Study of Semiconductor Film Bonding Technology on Piezoelectric Substrate Using Water Glass
スポンサーリンク
概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2003-09-15
著者
-
Aoki Yasushi
Japan Atomic Energy Research Institute
-
Aoki Y
Advanced Technology Research Center Kanagawa Institute Of Technology
-
KOH Keishin
Advanced Technology Research Center, Kanagawa Institute of Technology
-
DEGUCHI Taro
Advanced Technology Research Center, Kanagawa Institute of Technology
-
OKAMOTO Satoru
Advanced Technology Research Center, Kanagawa Institute of Technology
-
AOKI Yusuke
Advanced Technology Research Center, Kanagawa Institute of Technology
-
KANASHIRO Chinami
Advanced Technology Research Center, Kanagawa Institute of Technology
-
HOHKAWA Kohji
Advanced Technology Research Center, Kanagawa Institute of Technology
-
Kaneshiro C
Kanagawa Institute Of Technology
関連論文
- P2-10 SAW-Semiconductor UV Sensor Using GaN Film(Short oral presentation for posters)
- Generation of Interface Traps and Oxide-Trapped Charge in 6H-SiC Metal-Oxide-Semiconductor Transistors by Gamma-Ray Irradiation
- Annealing Properties of Defects in Ion-Implanted 3C-SiC Studied Using Monoenergetic Positron Beams
- Defects in Ion-Implanted 3C-SiC Probed by a Monoenergetic Positron Beam
- Electrochemical Etching of Indium Phosphide Surfaces Studied by Voltammetry and Scanned Probe Microscopes
- The Strong Correlation between Interface Microstructure and Barrier Height in Pt/n-InP Schottky Contacts Formed by an In Situ Electrochemical Process
- Formation of Size- and Position-Controlled Nanometer Size Pt Dots on GaAs and InP Substrates by Pulsed Electrochemical Deposition
- Fabrication of Si/LiNbO_3 Structure by Using Film Bonding Process
- One-Dimensional Propagation of Fluctuation in Magnetohydrodynamic Channels
- Diagnostics of Plasma Performance in Magnetohydrodynamics Generators
- Investigation of Vacancy-Type Defects in P^+-Implanted 6H-SiC Using Monoenergetic Positron Beams
- Grown-in Microdefects in a Slowly Grown Czochralski Silicon Crystal Observed by Synchrotron Radiation Topography
- Mierodefects in an As-Grown Czoehralski Silicon Crystal Studied by Synchrotron Radiation Section Topography with Aid of Computer Simulation
- Observation of Microdefects in As-Grown Czochralski Silicon Crystals by Synchrotron Radiation Topography
- Analysis of Misoriented Crystal Structure by Ion Channeling Observed Using Ion-Induced Secondary Electrons
- Formation of Size- and Position-Controlled Nanometer Size Pt Dots on GaAs and InP Substrates by Pulsed Electrochemical Deposition
- Study of Semiconductor Film Bonding Technology on Piezoelectric Substrate Using Water Glass
- Programmable Surface Acoustic Wave-Semiconductor Correlator with Multi-Strip Structure
- X-Ray Analysis of Stress Distribution in Semiconductor Films Bonded to a Piezoelectric Substrate(Instrumentation, Measurement, and Fabrication Technology)
- Surface Acoustic Wave Functional Devices Coupled with Film-Bonded Semiconductor Active Elements
- Evaluation of Numerical Aperture and Focusing Characteristics of Planar Microlens for Optical Interconnects : Optics and Quantum Electronics
- Simulation Study of Semicondcutor Coupled Surface Acoustic Wave Convolver through a Multi-Strip Electrodes
- Bonding Technology of Semiconductor Film on Piezoelectric Substrate Using Epitaxial Lift-Off Technology
- Parallel Optical-Transmission Module Using Vertical-Cavity Surface-Emitting Laser Array and Micro-Optical Bench (MOB) : Optics and Quantum Electronics
- Collimation Characteristics of Planar Microlens for Parallel Optical Interconnect
- Fabrication of Surface Acoustic Wave-Semiconductor Coupled Devices Using Epitaxial Lift-Off Technology
- Photoresponse on Surface Acoustic Wave Devices with Compound Semiconductor and LiNbO_3 Structures
- Fundamental Study of Parallel Moduling Scheme Based on a Micro-Optical Bench and Collimating Planar Microlenses
- A Bidirectional Optical Module Based on Stacked Planar Optical Circuit
- Two-Dimensional Alignment-Free Optical Interconnect Using Micro Optical Bench Scheme
- An Optical Network Unit (ONU) Chip Based on Stacked Planar Optics
- A Microoptic Network Unit Using Planar Microlens Array
- Sorption Mechanism of Europium by Apatite Using Rutherford Backscattering Spectroscopy and Resonant Nuclear Reaction Analysis
- Consideration of Optimal Magnet Coil Design Using Nb-Ti Superconductor for 200 MWe Magnetohydrodynamic Generator
- Consideration of Optimal Magnet Coil Design for 1300 MWth Coal Combustion Magnetohydrodynamic Generator
- Micro-arc Tests for MHD electrode materials
- Measurements of Flow Velocity and Temperature Profile in A Propane-Oxygen Combustion MHD Channel
- Plasma Temperature Profile in the Boundary Layers of an MHD Channel
- A Study on Boundary Layer Arc in an MHD Generator Channel
- Maximum Entropy Spectral Analysis of Time-Series Data from Combustion MHD Plasma : II. The Effect of An Externally-Applied Magnetic Field on the Plasma Turbulent Flow
- Maximum Entropy Spectral Analysis of Time-Series Data from Combustion MHD Plasma
- Measurement of the Time-Dependent Temperature Variation of Combustion MHD Plasma
- In Situ X-Ray Chemical Analysis of Y_1Ba_2Cu_3O_ Films by Reflection-High-Energy-Electron-Diffraction Total-Reflection-Angle X-Ray Spectroscopy
- X-Ray Chemical Analysis of an YBa_2Cu_3O_x Thin Film by Scanning Electron Microscopy and Total-Reflection-Angle X-Ray Spectroscopy (SEM-TRAXS)
- Novel Chemical Analysis for Thin Films: Scanning Electron Microscopy & Total-Reflection-Angle X-Ray Spectroscopy (SEM-TRAXS)-X-Ray Take-Off Angle Effect
- Study of Semiconductor Film Bonding Technology on Piezoelectric Substrate Using Water Glass