Novel Chemical Analysis for Thin Films: Scanning Electron Microscopy & Total-Reflection-Angle X-Ray Spectroscopy (SEM-TRAXS)-X-Ray Take-Off Angle Effect
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概要
- 論文の詳細を見る
Scanning electron microscopy & total-reflection-angle X-ray spectroscopy (SEM-TRAXS) was applied for fluorescence X-ray analysis of 50Å- and 125Å-thick Au thin films on Si (100). The intensity of the AuM line (2.15 keV) emitted from the Au thin films varied as a function of the take-off angle (θ_1) with respect to the film surface; the intensity of AuM line from the 125Å-thick Au thin film was 1.5 times as large as that of SiK_α line (1.74 keV) emitted from the Si substrate when θ_1=0°-3°, in the vicinity of a critical angle for total external reflection of the AuM line at Si (0.81°). In addition, the intensity of the AuM line emitted from the 50Å-thick Au thin film was also sufficiently strong for chemical analysis.
- 社団法人応用物理学会の論文
- 1991-09-15
著者
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TANAKA Shoji
Superconductivity Research Laboratory, International Superconductivity Technology Center
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Tanaka S
Superconductivity Research Laboratory International Superconductivity Technology Center
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Aoki Yasushi
Japan Atomic Energy Research Institute
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Kamei M
National Inst. Materials Sci. (nims) Ibaraki Jpn
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Kamei Masayuki
Advanced Materials Laboratory (aml) National Institute For Materials Science (nims)
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Kamei Masayuki
Institute Of Industrial Science University Of Tokyo
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Tanaka S
Osaka Prefecture Univ. Sakai
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Tanaka S
International Superconductivity Technol. Center Tokyo Jpn
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Tanaka S
Tokyo Inst. Technol. Tokyo Jpn
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Kamei M
National Inst. Res. Inorganic Materials Ibaraki Jpn
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Aoki Y
Advanced Technology Research Center Kanagawa Institute Of Technology
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Usui T
Hitachi Ltd. Ibaraki Jpn
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Morishita Tadataka
Superconductivity Research Laboratory International Superconductivity Technology Center
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Morishita T
Superconductivity Research Laboratory International Superconductivity Technology Center
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KAMEI Masayuki
Superconductivity Research Laboratory, ISTEC
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USUI Toshio
Superconductivity Research Laboratory, ISTEC
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AOKl Yuji
Superconductivity Resarch Laboratory, ISTEC
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Tanaka Shoji
Superconductivity Research Laboratory International Superconductivity Technology Center
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