In Situ X-Ray Chemical Analysis of Y_1Ba_2Cu_3O_<7-x> Films by Reflection-High-Energy-Electron-Diffraction Total-Reflection-Angle X-Ray Spectroscopy
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概要
- 論文の詳細を見る
Both the surface crystalline structure and chemical composition of Y-Ba-Cu-O film were examined in situ using reflection-high-energy-electron-diffraction and total-reflection-angle X-ray spectroscopy (RHEED-TRAXS). The chemical composition determined by TRAXS agreed well with that determined by inductively coupled plasma spectroscopy. The compositional deviation from Y_1Ba_2Cu_3O_<7-x> affected the surface crystalline structure of films, as was detected by RHEED and confirmed by scanning electron microscopy. RHEED-TRAXS is a powerful tool for in situ examination of the crystal growth of Y-Ba-Cu-O films.
- 社団法人応用物理学会の論文
- 1992-05-15
著者
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Aoki Yasushi
Japan Atomic Energy Research Institute
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Kamei M
National Inst. Materials Sci. (nims) Ibaraki Jpn
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Kamei Masayuki
Advanced Materials Laboratory (aml) National Institute For Materials Science (nims)
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Kamei Masayuki
Institute Of Industrial Science University Of Tokyo
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Aoki Yuji
Superconductivity Research Laboratory Istec
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Kamei M
National Inst. Res. Inorganic Materials Ibaraki Jpn
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Aoki Y
Advanced Technology Research Center Kanagawa Institute Of Technology
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Usui T
Hitachi Ltd. Ibaraki Jpn
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Morishita Tadataka
Superconductivity Research Laboratory International Superconductivity Technology Center
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Morishita T
Superconductivity Research Laboratory International Superconductivity Technology Center
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KAMEI Masayuki
Superconductivity Research Laboratory, ISTEC
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USUI Toshio
Superconductivity Research Laboratory, ISTEC
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